Ultraviolet Raman stress mapping in silicon

Applied Physics Letters

Volumn 74, Issue 14, 1999, Pages 2008-2010

  Holtz, M ^a   Carty, J C ^a,b   Duncan, W M ^b  

^a TEXAS TECH UNIVERSITY   (United States)

^b TEXAS INSTRUMENTS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

PHONONS; POLYCRYSTALLINE MATERIALS; RAMAN SCATTERING; SEMICONDUCTOR DEVICE STRUCTURES; STRESS ANALYSIS; ULTRAVIOLET RADIATION;

MICRO-RAMAN STRESS IMAGING;

SILICON WAFERS;

EID: 0032607134     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.123729     Document Type: Article

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