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Volumn 46, Issue 9, 1999, Pages 1890-1894

Improvement on P-channel SOI LDMOS transistor by adapting a new tapered oxide technique

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC POTENTIAL; OXIDATION; OXIDES; SILICON ON INSULATOR TECHNOLOGY;

EID: 0032595349     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/16.784190     Document Type: Article
Times cited : (11)

References (16)
  • 1
    • 0032021763 scopus 로고    scopus 로고
    • Integration of 5-V CMOS and high-voltage devices for display driver applications
    • J. Kim, M.-Y. Park, J. Y. Kang, S. Y. Lee, J.-G. Koo, and K.-S. Nam, "Integration of 5-V CMOS and high-voltage devices for display driver applications," ETRI J., vol. 20, no. 1, pp. 37-45, 1998.
    • (1998) ETRI J. , vol.20 , Issue.1 , pp. 37-45
    • Kim, J.1    Park, M.-Y.2    Kang, J.Y.3    Lee, S.Y.4    Koo, J.-G.5    Nam, K.-S.6
  • 2
    • 84941607696 scopus 로고
    • Integration of power LDMOS into a low-voltage 0.5 μm BiCMOS technology
    • P. G. Y. Tsui, P. V. Gilbert, and S. W. Sun, "Integration of power LDMOS into a low-voltage 0.5 μm BiCMOS technology," in IEDM Tech. Dig., pp. 27-30, 1992.
    • (1992) IEDM Tech. Dig. , pp. 27-30
    • Tsui, P.G.Y.1    Gilbert, P.V.2    Sun, S.W.3
  • 3
    • 0030674615 scopus 로고    scopus 로고
    • A novel high-frequency LDMOS transistor using an extended gate RESURF technology
    • L. Vestling, B. Edhholm, J. Olsson, S. Tiensuu, and A. Soderbrag, "A novel high-frequency LDMOS transistor using an extended gate RESURF technology," in Proc. ISPSD'97, pp. 45-48.
    • Proc. ISPSD'97 , pp. 45-48
    • Vestling, L.1    Edhholm, B.2    Olsson, J.3    Tiensuu, S.4    Soderbrag, A.5
  • 4
    • 3042946777 scopus 로고
    • Development of process for low on-resistance vertical power MOSFET's
    • K. Kobayashi, Y. Ninomiya, M. Takahashi, and M. Maruoka, "Development of process for low on-resistance vertical power MOSFET's," NEC Res. & Develop., vol. 35, no. 4, pp. 433-437, 1994.
    • (1994) NEC Res. & Develop. , vol.35 , Issue.4 , pp. 433-437
    • Kobayashi, K.1    Ninomiya, Y.2    Takahashi, M.3    Maruoka, M.4
  • 5
    • 0018714042 scopus 로고
    • High voltage thin layer devices (RESURF devices)
    • J. A. Appels and H. M. J. Vaes, "High voltage thin layer devices (RESURF devices)," in IEEE IEDM Digest, 1979, pp. 238-241.
    • (1979) IEEE IEDM Digest , pp. 238-241
    • Appels, J.A.1    Vaes, H.M.J.2
  • 9
    • 0018997235 scopus 로고
    • Graded etching of thermal oxide with various angles using silica film
    • Y. I. Choi, Y. S. Kwon, and C. K. Kim, "Graded etching of thermal oxide with various angles using silica film," IEEE Electron Device Lett., vol. EDL-1, pp. 30-31, 1980.
    • (1980) IEEE Electron Device Lett. , vol.EDL-1 , pp. 30-31
    • Choi, Y.I.1    Kwon, Y.S.2    Kim, C.K.3
  • 10
    • 0031212177 scopus 로고    scopus 로고
    • Boron out diffusion from Si substrates in various ambients
    • K. Suzuki, H. Yamawaki, and Y. Tada, "Boron out diffusion from Si substrates in various ambients," Solid-State Electron., vol. 41, no. 8, pp. 1095-1097, 1997.
    • (1997) Solid-state Electron. , vol.41 , Issue.8 , pp. 1095-1097
    • Suzuki, K.1    Yamawaki, H.2    Tada, Y.3
  • 11
    • 0004753715 scopus 로고
    • Redistribution of diffused boron in silicon by thermal oxidation
    • T. Kato and Y. Nishi, "Redistribution of diffused boron in silicon by thermal oxidation," Jpn. J. Appl. Phys., vol. 3, no. 7, pp. 377-383, 1964.
    • (1964) Jpn. J. Appl. Phys. , vol.3 , Issue.7 , pp. 377-383
    • Kato, T.1    Nishi, Y.2
  • 13
    • 0031622344 scopus 로고    scopus 로고
    • A novel p-channel SOI LDMOS transistor with tapered field oxides
    • J. Kim, S. G. Kim, T. M. Roh, J. G. Koo, and K.-S. Nam, "A novel p-channel SOI LDMOS transistor with tapered field oxides," in Proc. ISPSD'98, pp. 375-378.
    • Proc. ISPSD'98 , pp. 375-378
    • Kim, J.1    Kim, S.G.2    Roh, T.M.3    Koo, J.G.4    Nam, K.-S.5
  • 14
    • 0031212177 scopus 로고    scopus 로고
    • Boron out diffusion from Si substrates in various ambients
    • K. Suzuki, H. Yamawaki, and Y. Tada, "Boron out diffusion from Si substrates in various ambients," Solid-State Electron., vol. 41, pp. 1095-1097, 1997.
    • (1997) Solid-state Electron. , vol.41 , pp. 1095-1097
    • Suzuki, K.1    Yamawaki, H.2    Tada, Y.3
  • 15
    • 0004753715 scopus 로고
    • Redistribution of diffused boron in silicon by thermal oxidation
    • T. Kato and Y. Nishi, "Redistribution of diffused boron in silicon by thermal oxidation," Jpn. J. Appl. Phys., vol. 3, pp. 377-383, 1964.
    • (1964) Jpn. J. Appl. Phys. , vol.3 , pp. 377-383
    • Kato, T.1    Nishi, Y.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.