Monohydride formation on vicinal Si(001) investigated by reflectance anisotropy spectroscopy

Physica Status Solidi (A) Applied Research

Volumn 175, Issue 1, 1999, Pages 63-69

  Power, J R ^a   Richter, W ^a   Palummo, M ^b   Onida, G ^b   Del Sole, R ^b  

^a TECHNISCHE UNIVERSITÄT BERLIN   (Germany)

^b UNIVERSITY OF ROME TOR VERGATA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; ANNEALING; GAS ADSORPTION; HYDRIDES; HYDROGEN; LOW ENERGY ELECTRON DIFFRACTION;

REFLECTANCE ANISOTROPY SPECTROSCOPY (RAS);

SEMICONDUCTING SILICON;

EID: 0032594883     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1521-396X(199909)175:1<63::AID-PSSA63>3.0.CO;2-4     Document Type: Article

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