Hydrogenated and oxidized vicinal Si(001) surfaces investigated by reflectance-difference spectroscopy

Applied Surface Science

Volumn 104-105, Issue , 1996, Pages 137-140

  Rossow, U ^a   Mantese, L ^a   Yasuda, T ^a   Aspnes, D E ^a  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; HYDROGENATION; OPTICAL PROPERTIES; OXIDATION; SURFACE PHENOMENA;

SEMICONDUCTING SILICON;

EID: 18144445601     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(96)00134-1     Document Type: Article

References (11)

1. E. Hartmannsgruber, U. Rossow, A. Hoyer and P. Lange, J. Non-Cryst. Solids 187 (1995) 380.
2. D.E. Aspnes, J. Vac. Sci. Technol. B 3 (1985) 1498.
3. D.E. Aspnes, J.P. Harbison, A.A. Studna, L.T. Florez and M.K. Kelly, J. Vac. Sci. Technol. A 6 (1988) 1327.
4. W. Richter, Phil. Trans. R. Soc. A 344 (1993) 453.
5. W. Kern and D.A. Puotinen, RCA Rev. 31 (1970) 187.
6. D.E. Aspnes and A.A. Studna, J. Vac. Sci. Technol. A 5 (1987) 546.
7. T. Yasuda, D.E. Aspnes, D.R. Lee, C.H. Bjorkman and G. Lucovsky, J. Vac. Sci. Technol. A 12 (1994) 1152.
8. T. Yasuda, L. Mantese, U. Rossow and D.E. Aspnes, Phys. Rev. Lett. 17 (1995) 3431.
9. J.R. Chelikowsky and M.L. Cohen, Phys. Rev. 10 (1974) 5095.
10. D. Gräf, S. Bauer-Mayer and A. Schnegg, J. Appl. Phys. 74 (1993) 1679.
11. G.J. Pietsch, U. Köhler and M. Henzler, J. Vac. Sci. Technol. B 12 (1994) 78.