Correlations between composition, texture, and polarization in SrxBiyTa2O5+x+3y/2 thin films deposited by MOCVD

Materials Research Society Symposium - Proceedings

Volumn 541, Issue , 1999, Pages 275-280

  Hendrix, Bryan C ^a   Hintermaier, Frank ^b   Desrochers, Debra A ^a   Roeder, Jeffrey F ^a   Baum, Thomas H ^a   Dehm, Christine ^b   Nagel, Nikolas ^b   Honlein, Wolfgang ^b   Mazure, Carlos ^b  

^a ENTEGRIS INC   (United States)

^b SIEMENS AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION; CRYSTAL ORIENTATION; FERROELECTRIC MATERIALS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; NONVOLATILE STORAGE; PHASE TRANSITIONS; POLARIZATION; RANDOM ACCESS STORAGE; STOICHIOMETRY; STRONTIUM COMPOUNDS; TEXTURES; X RAY DIFFRACTION ANALYSIS;

AURIVILLIUS PHASE; FERROELECTRIC RANDOM ACCESS STORAGE;

THIN FILMS;

EID: 0032592330     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (12)

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