Tapping mode capacitance microscopy

Review of Scientific Instruments

Volumn 68, Issue 1, 1997, Pages 120-123

  Goto, Kazuya ^a,b   Hane, Kazuhiro ^a  

^a TOHOKU UNIVERSITY   (Japan)

^b JAPAN SOCIETY FOR THE PROMOTION OF SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHROMIUM; DATA STORAGE EQUIPMENT; DIELECTRIC FILMS; ELECTRODES; FEEDBACK CONTROL; MICROSCOPIC EXAMINATION; MODULATION; SEMICONDUCTING SILICON COMPOUNDS; SURFACES; VOLTAGE MEASUREMENT;

NITRIDE OXIDE SILICON STRUCTURES; NONVOLATILE MEMORIES; TAPPING MODE CAPACITANCE MICROSCOPY; TIP SAMPLE DISTANCE;

CAPACITANCE MEASUREMENT;

EID: 0030783498     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1147749     Document Type: Article

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