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Physical Review B

Volumn 52, Issue 23, 1995, Pages 16696-16701

Surface morphology of Ge(001) during etching by low-energy ions

(3) Chey, S Jay a Van Nostrand, Joseph E a Cahill, David G a

a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000361068 PISSN: 01631829 EISSN: None Source Type: Journal
DOI: 10.1103/PhysRevB.52.16696 Document Type: Article

Times cited : (51)

References (29)

1
- 0000786593
- (1993) Phys. Rev. E , vol.48 , pp. 852
- Vvedensky, D.D.¹ Zangwill, A.² Luse, C.N.³ Wilby, M.R.⁴

2
- 36849118174
- (1958) J. Appl. Phys. , vol.29 , pp. 217
- Wehner, G.K.¹

3
- 0025399409
- (1990) Nucl. Instrum. Methods Phys. Res. Sect. B , vol.48 , pp. 414
- Picraux, S.T.¹ Brice, D.K.² Horn, K.M.³ Tsao, J.Y.⁴ Chason, E.⁵

4
- 0042324779
- Surface roughening of Ge(001) during 200 eV Xe ion bombardment and Ge molecular beam epitaxy
- (1990) Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films , vol.8 , pp. 2507
- Chason, E.¹ Tsao, J.Y.² Horn, K.M.³ Picraux, S.T.⁴ Atwater, H.A.⁵

5
- 0012330595
- (1994) Phys. Rev. Lett. , vol.72 , pp. 3040
- Chason, E.¹ Mayer, T.M.² Kellerman, B.K.³ McIlroy, D.T.⁴ Howard, A.J.⁵

6
- 0028274433
- (1994) Surf. Sci. , vol.301 , pp. 223
- Bedrossian, P.¹

7
- 0001126052
- (1994) Phys. Rev. B , vol.50 , pp. 4430
- Rioux, D.¹ Pechman, R.J.² Chander, M.³ Weaver, J.H.⁴

8
- 12044253504
- (1994) Phys. Rev. Lett. , vol.73 , pp. 999
- Seiple, J.V.¹ Pelz, J.P.²

9
- 0026743719
- Harold
- (1992) Surf. Sci. Rep. , vol.14 , pp. 161
- Winters, F.¹ Coburn, J.W.²

10
- 0042503177
- Eun Hee Cirlin, John
- (1994) J. Vac. Sci. Technol. B , vol.12 , pp. 269
- Vajo, J.¹ Hasenberg, T.C.²

11
- 0000402110
- Influence of oxygen on the formation of ripples on Si
- (1993) Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures , vol.11 , pp. 1968
- Elst, K.¹ Vandervorst, W.² Alay, J.³ Snauwaert, J.⁴ Hellemans, L.⁵

12
- 0000632431
- (1993) Nucl. Instrum. Methods Phys. Res. Sect. B , vol.82 , pp. 207
- Michely¹ Comsa²

13
- 0027115119
- (1992) Surf. Sci. , vol.272 , pp. 204
- Michely¹ Land² Littmark³ Comsa⁴

14
- 36849110552
- Gert Ehrlich and
- (1966) J. Chem. Phys. , vol.44 , pp. 1039
- Hudda, F.G.¹

15
- 0001776828
- Continuum models of crystal growth from atomic beams with and without desorption
- (1991) Journal de Physique I , vol.1 , pp. 19
- Villain, J.¹

16
- 3343020032
- (1994) Phys. Rev. Lett. , vol.72 , pp. 116
- Johnson, M.D.¹ Orme, C.² Hunt, A.W.³ Graff, D.⁴ Sudijono, J.⁵ Sander, L.M.⁶ Orr, B.G.⁷

17
- 0000959204
- Joseph
- (1995) Phys. Rev. Lett. , vol.74 , pp. 1127
- Van Nostrand, E.¹ Jay Chey, S.² Hasan, M.A.³ Cahill⁴ Greene, J.E.⁵

18
- 84926596325
- Joseph A. Stroscio, D. T. Pierce, M. Stiles, A. Zangwill, and L. M. Sander (unpublished).

19
- 84946547716
- (1988) J. Vac. Sci. Technol. A , vol.6 , pp. 2390
- Mark Bradley, R.¹ Harper²

20
- 33744612571
- Thermal desorption of ultraviolet–ozone oxidized Ge(001) for substrate cleaning
- (1993) Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films , vol.11 , pp. 2553
- Zhang, X.J.¹ Xue, G.² Agarwal, A.³ Tsu, R.⁴ Hasan, M.A.⁵ Greene, J.E.⁶ Rockett, A.⁷

21
- 0019565711
- (1981) J. Electrochem. Soc. , vol.128 , pp. 1077
- Harper, J.M.E.¹ Cuomo, J.J.² Leary, P.A.³ Summa, G.M.⁴ Kaufman, H.R.⁵ Bresnock, F.J.⁶

22
- 0000784758
- (1962) J. Appl. Phys. , vol.33 , pp. 1842
- Rosenberg, D.¹ Wehner, G.K.²

23
- 36549104730
- (1990) Appl. Phys. Lett. , vol.57 , pp. 1793
- Chason, E.¹ Bedrossian, P.² Horn, K.M.³ Tsao, J.Y.⁴ Picraux, S.T.⁵

24
- 0027929621
- (1994) Surf. Sci. Rep. , vol.20 , pp. 191
- Lapujoulade¹

25
- 0029345763
- Joseph
- (1995) J. Vac. Sci. Technol. B , vol.13 , pp. 1816
- Van Nostrand, E.¹ Jay Chey, S.² Cahill³

26
- 0001301076
- Single atom vacancies are thought to decay rapidly into dimer vacancies, see Zhenyu Zheng and Horia Metiu
- Single atom vacancies are thought to decay rapidly into dimer vacancies, see Zhenyu Zheng and Horia Metiu, Phys. Rev. B 48, 8166 (1993).
- (1993) Phys. Rev. B , vol.48 , pp. 8166

27
- 0001693562
- Terrace sizes in molecular beam epitaxy
- (1992) Journal de Physique I , vol.2 , pp. 2107
- Villain¹ Pimpinelli² Tang³ Wolf⁴

28
- 84926531287
- While the data for d versus t approximate a power law, we do not observe a single, well defined power law for a large range of t and are therefore unable to apply a quantitative scaling analysis to our data.

29
- 0026170685
- (1991) Surf. Sci. , vol.248 , pp. 313
- Mo, Y.W.¹ Lagally, M.G.²

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