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Volumn 31, Issue 17, 1998, Pages 2155-2164

Self-consistent modelling of overdense plasmas in ECR discharges

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; ELECTRIC DISCHARGES; ELECTROMAGNETIC WAVE PROPAGATION IN PLASMA; ELECTRON CYCLOTRON RESONANCE; MAGNETIC FIELDS; MATHEMATICAL MODELS; MAXWELL EQUATIONS;

EID: 0032494079     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/31/17/013     Document Type: Article
Times cited : (9)

References (21)
  • 2
    • 0000086435 scopus 로고
    • Electron cyclotron resonance plasma sources and their use in plasma-assisted chemical vapour deposition of thin films
    • ed M Francombe and J Vossen (San Diego: Academic)
    • Popov O A 1994 Electron cyclotron resonance plasma sources and their use in plasma-assisted chemical vapour deposition of thin films Physics of Thin Films vol 18, ed M Francombe and J Vossen (San Diego: Academic) pp 121-233
    • (1994) Physics of Thin Films , vol.18 , pp. 121-233
    • Popov, O.A.1
  • 12
    • 0001044420 scopus 로고
    • Transport processes in a plasma
    • ed M A Leontovich (New York: Consultants Bureau)
    • Braginskii S I 1965 Transport processes in a plasma Reviews of Plasma Physics vol 1, ed M A Leontovich (New York: Consultants Bureau) p 205
    • (1965) Reviews of Plasma Physics , vol.1 , pp. 205
    • Braginskii, S.I.1
  • 17
    • 0004278048 scopus 로고
    • New York: American Institute of Physics
    • Stix T H 1992 Waves in Plasmas (New York: American Institute of Physics)
    • (1992) Waves in Plasmas
    • Stix, T.H.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.