Spatial distributions of electron temperature and density in electron cyclotron resonance discharges

Journal of Applied Physics

Volumn 81, Issue 5, 1997, Pages 2105-2113

  Cronrath, W ^a   Bowden, M D ^a   Uchino, K ^a   Muraoka, K ^a   Muta, H ^b   Yoshida, M ^c  

^a KYUSHU UNIVERSITY   (Japan)

^b KITAKYUSHU NATIONAL COLLEGE OF TECHNOLOGY   (Japan)

^c MITSUBISHI HEAVY INDUSTRIES LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001009358     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.364262     Document Type: Article

References (13)

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