Parallel patterning with nanochannel glass replica membranes

Advanced Materials

Volumn 8, Issue 12, 1996, Pages 1031-1034

  Pearson, Douglas H ^a   Tonucci, Ronald J ^a  

^a NAVAL RESEARCH LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DENSITY (SPECIFIC GRAVITY); MASKS; MORPHOLOGY; PHOTOLITHOGRAPHY; POLYMERIC GLASS; POLYMERIC MEMBRANES; REACTIVE ION ETCHING; SCANNING ELECTRON MICROSCOPY; SPUTTER DEPOSITION; SUBSTRATES; THERMODYNAMIC STABILITY;

NANOCHANNEL GLASS (NCG) REPLICA MEMBRANES; PARALLEL SUBSTRATE PATTERNING;

NANOSTRUCTURED MATERIALS;

EID: 0030383405     PISSN: 09359648     EISSN: None     Source Type: Journal    
DOI: 10.1002/adma.19960081222     Document Type: Article

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