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Thin Solid Films

Volumn 332, Issue 1-2, 1998, Pages 136-140

Diamond deposition from methanol-hydrogen-water mixed gas using a low pressure, radio frequency, inductively-coupled plasma

(5) Hiramatsu, Mineo a Noda, Hideyuki a Nagai, Hisao a Shimakura, Masao a Nawata, Masahito a

a MEIJO UNIVERSITY (Japan)

Author keywords

Diamond film; Inductively coupled plasma

Indexed keywords

HYDROGEN; METHANOL; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON WAFERS; SYNTHESIS (CHEMICAL); SYNTHETIC DIAMONDS; WATER;

INDUCTIVELY COUPLED PLASMAS;

DIAMOND FILMS;

EID: 0032476232 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(98)01022-0 Document Type: Article

Times cited : (10)

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