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Thin Solid Films

Volumn 315, Issue 1-2, 1998, Pages 49-56

Growth of Ge layers on Si(100) monitored by in situ ellipsometry

(5) Larciprete, R a Cozzi, S a Masetti, E b Montecchi, M b Padeletti, G c

a ENEA (Italy)

b ENEA (Italy)

c CNR (Italy)

Author keywords

Atomic force microscopy (AFM); Chemical vapour deposition (CVD); Ellipsometry; Surface morphology

Indexed keywords

APPROXIMATION THEORY; ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; ELLIPSOMETRY; MATHEMATICAL MODELS; MORPHOLOGY; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SEMICONDUCTING SILICON; SEMICONDUCTOR GROWTH; THERMAL EFFECTS; X RAY PHOTOELECTRON SPECTROSCOPY;

EFFECTIVE MEDIUM APPROXIMATION (EMA);

SEMICONDUCTING GERMANIUM;

EID: 0032473337 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(97)00585-3 Document Type: Article

Times cited : (8)

References (44)

1
- 84943994960
- E. Bauer, Z. Kristallog. 110 (1958) 372.
- (1958) Z. Kristallog. , vol.110 , pp. 372
- Bauer, E.¹

2
- 0003539548
- May
- B.G. Levi, Physics Today, May 1996, p. 22.
- (1996) Physics Today , pp. 22
- Levi, B.G.¹

3
- 0029358642
- P. Schittenhelm, M. Gail, J. Brunner, J.F. Nützel, G. Abstraiter, Appl. Phys. Lett. 66 (1995) 1292.
- (1995) Appl. Phys. Lett. , vol.66 , pp. 1292
- Schittenhelm, P.¹ Gail, M.² Brunner, J.³ Nützel, J.F.⁴ Abstraiter, G.⁵

4
- 0029309042
- H. Sunamura, N. Usami, Y. Shiraki, S. Fukatsu, Appl. Phys. Lett. 66 (1995) 3024.
- (1995) Appl. Phys. Lett. , vol.66 , pp. 3024
- Sunamura, H.¹ Usami, N.² Shiraki, Y.³ Fukatsu, S.⁴

5
- 0001520373
- E. Palange, G. Capellini, L. Di Gaspare, F. Evangelisti, Appl. Phys. Lett. 68 (1996) 2982.
- (1996) Appl. Phys. Lett. , vol.68 , pp. 2982
- Palange, E.¹ Capellini, G.² Di Gaspare, L.³ Evangelisti, F.⁴

6
- 36448998842
- R. Apetz, L. Vescan, A. Hartmann, C. Dieker, H. Lüth, Appl. Phys. Lett. 66 (1995) 445.
- (1995) Appl. Phys. Lett. , vol.66 , pp. 445
- Apetz, R.¹ Vescan, L.² Hartmann, A.³ Dieker, C.⁴ Lüth, H.⁵

7
- 0003542751
- INSPEC, London
- E. Kasper (Ed.), Properties of Strained and Relaxed Silicon Germanium, INSPEC, London, 1995.
- (1995) Properties of Strained and Relaxed Silicon Germanium
- Kasper, E.¹

8
- 3643130905
- D.J. Eaglesham, C. Cerullo, Phys. Rev. Lett. 64 (1990) 1943.
- (1990) Phys. Rev. Lett. , vol.64 , pp. 1943
- Eaglesham, D.J.¹ Cerullo, C.²

9
- 0346215019
- B. Cunningham, J.O. Chu, S. Akbar, Appl. Phys. Lett. 59 (1991) 3574.
- (1991) Appl. Phys. Lett. , vol.59 , pp. 3574
- Cunningham, B.¹ Chu, J.O.² Akbar, S.³

10
- 0026170685
- Y.-W. Mo, M.G. Lagally, Surf. Sci. 248 (1991) 313.
- (1991) Surf. Sci. , vol.248 , pp. 313
- Mo, Y.-W.¹ Lagally, M.G.²

11
- 0023346185
- K. Sakamoto, T. Sakamoto, S. Nagao, G. Hashiguchi, K. Kuniyoshi, Y. Bando, Jpn. J. Appl. Phys. 26 (1987) 666.
- (1987) Jpn. J. Appl. Phys. , vol.26 , pp. 666
- Sakamoto, K.¹ Sakamoto, T.² Nagao, S.³ Hashiguchi, G.⁴ Kuniyoshi, K.⁵ Bando, Y.⁶

12
- 0028742979
- M.H. Xie, J. Zhang, S.M. Mokler, J. Fernandez, B.A. Joyce, Surf. Sci. 320 (1994) 259.
- (1994) Surf. Sci. , vol.320 , pp. 259
- Xie, M.H.¹ Zhang, J.² Mokler, S.M.³ Fernandez, J.⁴ Joyce, B.A.⁵

13
- 36549097589
- D.E. Aspnes, W.E. Quinn, S. Gregory, Appl. Phys. Lett. 18 (1990) 2569.
- (1990) Appl. Phys. Lett. , vol.18 , pp. 2569
- Aspnes, D.E.¹ Quinn, W.E.² Gregory, S.³

14
- 0026914037
- V.N. Kruchinin, S.M. Repinsky, A.A. Shklyaev, Surf. Sci. 275 (1992) 433.
- (1992) Surf. Sci. , vol.275 , pp. 433
- Kruchinin, V.N.¹ Repinsky, S.M.² Shklyaev, A.A.³

15
- 0037885626
- M. Racanelli, C.I. Drowley, N.D. Theodore, R.B. Gregory, H.G. Tompkins, D.J. Meyer, Appl. Phys. Lett. 60 (1992) 2225.
- (1992) Appl. Phys. Lett. , vol.60 , pp. 2225
- Racanelli, M.¹ Drowley, C.I.² Theodore, N.D.³ Gregory, R.B.⁴ Tompkins, H.G.⁵ Meyer, D.J.⁶

16
- 0346064153
- D.J. Heim, T.G. Holesinge, K.M. Lakin, H.R. Shanks, Mat. Res. Soc. Symp. Proc. 116 (1988) 523.
- (1988) Mat. Res. Soc. Symp. Proc. , vol.116 , pp. 523
- Heim, D.J.¹ Holesinge, T.G.² Lakin, K.M.³ Shanks, H.R.⁴

17
- 0028482832
- P. Boucaud, F. Glowacki, F. Ferrieu, A. Larrè, A. Perio, D. Bensahel, Thin Solid Films 248 (1994) 1.
- (1994) Thin Solid Films , vol.248 , pp. 1
- Boucaud, P.¹ Glowacki, F.² Ferrieu, F.³ Larrè, A.⁴ Perio, A.⁵ Bensahel, D.⁶

18
- 0030564791
- R. Larciprete, S. Cozzi, E. Masetti, M. Montecchi, Appl. Surf. Sci. 102 (1996) 52.
- (1996) Appl. Surf. Sci. , vol.102 , pp. 52
- Larciprete, R.¹ Cozzi, S.² Masetti, E.³ Montecchi, M.⁴

19
- 0021794434
- R.M. Azzam, Opt. Lett. 10 (1985) 309.
- (1985) Opt. Lett. , vol.10 , pp. 309
- Azzam, R.M.¹

20
- 0009538385
- R.M. Azzam, E. Masetti, I.M. Elminyawi, F.G. Grosz, Rev. Sci. Instrum. 59 (1988) 84.
- (1988) Rev. Sci. Instrum. , vol.59 , pp. 84
- Azzam, R.M.¹ Masetti, E.² Elminyawi, I.M.³ Grosz, F.G.⁴

21
- 0028449580
- E. Masetti, M.P. de Silva, Thin Solid Films 246 (1994) 47.
- (1994) Thin Solid Films , vol.246 , pp. 47
- Masetti, E.¹ De Silva, M.P.²

22
- 0000389489
- D.A.G. Bruggeman, Ann. Phys. (Leip.) 24 (1934) 636.
- (1934) Ann. Phys. (Leip.) , vol.24 , pp. 636
- Bruggeman, D.A.G.¹

23
- 35949035159
- D.E. Aspnes, J.B. Theeten, F. Hottier, Phys. Rev. B 20 (1979) 3292.
- (1979) Phys. Rev. B , vol.20 , pp. 3292
- Aspnes, D.E.¹ Theeten, J.B.² Hottier, F.³

24
- 0004059426
- E. Masetti, M. Montecchi, R. Larciprete, S. Cozzi, Appl. Opt. 35 (1996) 5626.
- (1996) Appl. Opt. , vol.35 , pp. 5626
- Masetti, E.¹ Montecchi, M.² Larciprete, R.³ Cozzi, S.⁴

25
- 0003808259
- North Holland, Oxford
- R.M. Azzam, N.M. Bashara, in: Ellipsometry and Polarized Light, North Holland, Oxford, 1977.
- (1977) Ellipsometry and Polarized Light
- Azzam, R.M.¹ Bashara, N.M.²

26
- 0000108278
- G.E. Jellison Jr., F.A. Modine, Phys. Rev. B 27 (1983) 7466.
- (1983) Phys. Rev. B , vol.27 , pp. 7466
- Jellison G.E., Jr.¹ Modine, F.A.²

27
- 0005887273
- Yu.B. Algazin, Yu.A. Blyumkina, N.I. Grebnev, K.K. Svitashev, L.V. Semenenko, T.M. Yablontseva, Opt. Spektrosk. 45 (1978) 183.
- (1978) Opt. Spektrosk. , vol.45 , pp. 183
- Algazin, Yu.B.¹ Blyumkina, Yu.A.² Grebnev, N.I.³ Svitashev, K.K.⁴ Semenenko, L.V.⁵ Yablontseva, T.M.⁶

28
- 0020843991
- R. Memeo, F. Ciccacci, C. Mariani, S. Ossicini, Thin Solid Films 109 (1983) 159.
- (1983) Thin Solid Films , vol.109 , pp. 159
- Memeo, R.¹ Ciccacci, F.² Mariani, C.³ Ossicini, S.⁴

29
- 0003459529
- Eden Prairie (Ed.), Perkin-Elmer, MN
- C.D. Wagner, W.M. Riggs, L.E. Davis, J.F. Moulder, G.E. Mnilenberger, in: Eden Prairie (Ed.), Handbook of X-ray Photolectron Spectroscopy, Perkin-Elmer, MN, 1979.
- (1979) Handbook of X-ray Photolectron Spectroscopy
- Wagner, C.D.¹ Riggs, W.M.² Davis, L.E.³ Moulder, J.F.⁴ Mnilenberger, G.E.⁵

30
- 0018436046
- M.P. Seah, W.A. Dentch, Surf. Interface Anal. 1 (1979) 2.
- (1979) Surf. Interface Anal. , vol.1 , pp. 2
- Seah, M.P.¹ Dentch, W.A.²

31
- 0026852307
- J. Knall, D.B. Pethica, Surf. Sci. 265 (1992) 156.
- (1992) Surf. Sci. , vol.265 , pp. 156
- Knall, J.¹ Pethica, D.B.²

32
- 0001223314
- B. Voigtländer, A. Zinner, Appl. Phys. Lett. 3 (1993) 3055.
- (1993) Appl. Phys. Lett. , vol.3 , pp. 3055
- Voigtländer, B.¹ Zinner, A.²

33
- 3643130905
- D.J. Eaglesham, M. Cerullo, Phys. Rev. Lett. 64 (1990) 1943.
- (1990) Phys. Rev. Lett. , vol.64 , pp. 1943
- Eaglesham, D.J.¹ Cerullo, M.²

34
- 0346215019
- B. Cunningham, J.O. Chu, S. Akbar, Appl. Phys. Lett. 59 (1991) 3574.
- (1991) Appl. Phys. Lett. , vol.59 , pp. 3574
- Cunningham, B.¹ Chu, J.O.² Akbar, S.³

35
- 0347325355
- Wiley, New York
- G. Padeletti, G.M. Ingo, R. Larciprete, P. Willmott, E. Borsella, Proceeding of the 6th European Conference on Applications of Surface and Interface Analysis (ECASIA 95), Wiley, New York, 1996, p. 395.
- (1996) Proceeding of the 6th European Conference on Applications of Surface and Interface Analysis (ECASIA 95) , pp. 395
- Padeletti, G.¹ Ingo, G.M.² Larciprete, R.³ Willmott, P.⁴ Borsella, E.⁵

36
- 0000533566
- T.I. Kamins, E.C. Carr, R.S. Williams, S.J. Rosner, J. Appl. Phys. 81 (1997) 211.
- (1997) J. Appl. Phys. , vol.81 , pp. 211
- Kamins, T.I.¹ Carr, E.C.² Williams, R.S.³ Rosner, S.J.⁴

37
- 0028542726
- M. Horn-von Hoegen, Appl. Phys. A 59 (1994) 503.
- (1994) Appl. Phys. A , vol.59 , pp. 503
- Horn-von Hoegen, M.¹

38
- 0004135598
- Academic Press, San Diego
- H.G. Tompkins, A User Guide to Ellipsometry, Academic Press, San Diego, 1993.
- (1993) A User Guide to Ellipsometry
- Tompkins, H.G.¹

39
- 0003081256
- A.J. Pidduck, D.J. Robbins, A.G. Cullis, W.Y. Leong, A.M. Pitt, Thin Solid Films 222 (1992) 78-84.
- (1992) Thin Solid Films , vol.222 , pp. 78-84
- Pidduck, A.J.¹ Robbins, D.J.² Cullis, A.G.³ Leong, W.Y.⁴ Pitt, A.M.⁵

40
- 0029407049
- C. Pickering, R.T. Carline, D.A.O. Hope, D.J. Robbins, Phys. Stat. Sol. A 152 (1995) 95-102.
- (1995) Phys. Stat. Sol. A , vol.152 , pp. 95-102
- Pickering, C.¹ Carline, R.T.² Hope, D.A.O.³ Robbins, D.J.⁴

41
- 4243477040
- P. Gupta, V.L. Colvin, S.M. George, Phys. Rev. B 37 (1988) 8234.
- (1988) Phys. Rev. B , vol.37 , pp. 8234
- Gupta, P.¹ Colvin, V.L.² George, S.M.³

42
- 0001355877
- C.M. Greenlief, S.M. Gates, P.A. Holbert, Chem. Phys. Lett. 159 (1988) 202.
- (1988) Chem. Phys. Lett. , vol.159 , pp. 202
- Greenlief, C.M.¹ Gates, S.M.² Holbert, P.A.³

43
- 0027656649
- B.M.H. Ning, J.E. Crowell, Surf. Sci. 295 (1993) 79.
- (1993) Surf. Sci. , vol.295 , pp. 79
- Ning, B.M.H.¹ Crowell, J.E.²

44
- 0003012988
- L. Surnev, M. Tikhov, Surf. Sci. 138 (1984) 40.
- (1984) Surf. Sci. , vol.138 , pp. 40
- Surnev, L.¹ Tikhov, M.²

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