Electrical characterization of defects introduced in p-Si1-xGex during electron-beam deposition of Sc Schottky barrier diodes

Applied Physics Letters

Volumn 72, Issue 9, 1998, Pages 1069-1071

  Mamor, M ^a   Auret, F D ^a   Goodman, S A ^a   Myburg, G ^a  

^a UNIVERSITY OF PRETORIA   (South Africa)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; COMPOSITION; CRYSTAL DEFECTS; DEEP LEVEL TRANSIENT SPECTROSCOPY; ELECTRIC VARIABLES MEASUREMENT; ELECTRONS; ENERGY GAP; IRRADIATION; METALLIZING; SCHOTTKY BARRIER DIODES;

BARRIER HEIGHT; ELECTRON BEAM DEPOSITION; ELECTRON BEAM EVAPORATION; ELECTRON IRRADIATION;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 0032473270     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.120967     Document Type: Article

References (18)

1. G. L. Zhou and H. Morkoc, Thin Solid Films 231, 125 (1993).
2. M. Arienzo, S. S. Iyer, B. S. Meyerson, G. L. Patton, and J. M. C. Stork, Appl. Surf. Sci. 48, 377 (1991).
3. S. S. Iyer, G. L. Patton, J. M. C. Stork, B. S. Meyerson, and D. L. Harame, IEEE Trans. Electron Devices 36, 2043 (1989).
4. G. A. Sai-Halasz and J. Gazecki, Appl. Phys. Lett. 45, 1067 (1984).
5. G. Myburg and F. D. Auret, J. Appl. Phys. 71, 6172 (1992).
6. F. D. Auret, S. A. Goodman, G. Myburg, and W. E. Meyer, J. Vac. Sci. Technol. B 10, 2366 (1992).
7. O. Paz and F. D. Auret, Mater. Res. Soc. Symp. Proc. 25, 619 (1984).
8. D. V. Lang, J. Appl. Phys. 45, 3023 (1974).
9. F. D. Auret and P. M. Mooney, J. Appl. Phys. 55, 984 (1984).
10. J. J. Goubet, D. Stievenard, D. Mathiot, and M. Zazoui, Phys. Rev. B 46, 10113 (1992).
11. P. Kringhøj and A. Nylandsted Larsen, Phys. Rev. B 52, 16333 (1995).
12. E. V. Monakhov, A. Nylandsted Larsen, and P. Kringhøj, J. Appl. Phys. 81, 1180 (1997).
13. S. S. Cohen and G. S. H. Gildenblat, Metal-Semiconductor Contacts (Academic, 1986), Vol. 13.
14. D. Dutartre, G. Bremond, A. Souifi, and T. Benyattou, Phys. Rev. B 44, 11525 (1991).
15. C. G. Van de Walle and R. M. Martin, Phys. Rev. B 34, 5621 (1986).
16. V. Aubry, F. Meyer, P. Warren, and D. Dutartre, Appl. Phys. Lett. 63, 2520 (1993).
17. O. Nur, M. Willander, R. Turan, M. R. Sardela, Jr., and G. V. Hansson, Appl. Phys. Lett. 68, 1084 (1996).
18. O. Nur, M. Willander, R. Turan, M. R. Sardela, Jr., H. H. Radamson, and G. V. Hansson, J. Vac. Sci. Technol. B 15, 241 (1997).