Electrical and structural characterization of PtSi/p-Si1-XGeX low Schottky barrier junctions prepared by co-sputtering

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 2, 1997, Pages 241-246

  Nur, O ^a   Willander, M ^a   Turan, R ^b   Sardela Jr , M R ^c   Radamson, H H ^c   Hansson, G V ^c  

^a CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

^b MIDDLE EAST TECHNICAL UNIVERSITY   (Turkey)

^c LINKÖPING UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 9144265040     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (21)

1. F. D. Shepherd, Proc. SPIE 250, 1735 (1992).
2. B.-Y. Tsaur, M. M. Weeks, and P. W. Pellegrini, IEEE Electron Device Lett. 9, 100 (1988).
3. B.-Y. Tsaur, C. K. Chen, and B. A. Nechay, IEEE Electron Device Lett. 11, 415 (1990).
4. H. Kanaya, F. Hasegawa, E. Yamaka, T. Moriyama, and M. Nakajima, Jpn. J. Appl. Phys. 28, L544 (1989).
5. X. Xiao, J. C. Sturm, S. R. Parihar, S. A. Lyon, D. Meyerhofer, S. Palfrey, and F. V. Shallcross, IEEE Electron Device Lett. 14, 199 (1993).
6. J. R. Jimenez, X. Xiao, J. C. Sturm, and P. W. Pellegrini, Appl. Phys. Lett. 67, 506 (1995).
7. O. Nur, M. R. Sardela, Jr., M. Willander, and R. Turan, Semicond. Sci. Technol. 10, 551 (1995).
8. O. Nur, M. Willander, R. Turan, M. R. Sardela, Jr., and G. V. Hansson, Appl. Phys. Lett. 68, 1084 (1995).
9. H. K. Liou, X. Wu, U. Gennser, V. P. Kesan, S. S. Iyer, K. N. Tu, and E. S. Yang, Appl. Phys. Lett. 60, 577 (1992).
10. J. R. Jimenez, X. Xiao, J. C. Sturm, P. W. Pellegrini, and M. M. Weeks, J. Appl. Phys. 75, 5160 (1994).
11. Q. Z. Hong and J. W. Mayer, J. Appl. Phys. 66, 611 (1989).
12. P. Zhong and Y. Zheng, Appl. Phys. Lett. 62, 3259 (1993).
13. M. R. Sardela, Jr. and G. V. Hansson, J. Vac. Sci. Technol. A 13, 314 (1995).
14. P. F. Fewster, Semicond. Sci. Technol. 8, 1915 (1993).
15. O. Nur, M. Willander, H. H. Radamson, M. R. Sardela, Jr., G. V. Hansson, C. S. Petersson, and K. Maex, Appl. Phys. Lett. 64, 440 (1994).
16. O. Nur, M. Willander, L. Hultman, H. H. Radamson, G. V. Hansson, M. R. Sardela, Jr., and J. E. Greene, J. Appl. Phys. 87, 7063 (1995).
17. A. Buxbaum, E. Zolotoyabko, M. Eizenberg, and F. Schaffler, Thin Solid Films 222, 157 (1992).
18. S. M. Sze, Physics of Semiconductor Devices (Wiley, New York, 1981), p. 245.
19. C. A. Crider and J. M. Poate, Appl. Phys. Lett. 36, 417 (1980).
20. R. People, IEEE Quantum Electron. 22, 1696 (1986).
21. M. Karlsteen and M. Willander, Solid State Electron. 33, 199 (1990).