Numerical simulation of silicon carbide chemical vapor deposition

Diamond and Related Materials

Volumn 5, Issue 2, 1996, Pages 141-150

  De Jong, F ^a   Meyyappan, M ^a  

^a Scientific Research Associates Inc   (United States)

Author keywords

Chemical vapour deposition; Silicon carbide

Indexed keywords

SILICON CARBIDE; SIMULATION NUMERICAL; VAPOUR DEPOSITION;

EID: 0029674192     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/0925-9635(96)00475-X     Document Type: Article

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