Epitaxial growth of Cu(111) films on Si(110) by magnetron sputtering: Orientation and twin growth

Thin Solid Films

Volumn 315, Issue 1-2, 1998, Pages 13-16

  Jiang, H ^a   Klemmer, T J ^a   Barnard, J A ^a   Doyle, W D ^a   Payzant, E A ^b  

^a University of Alabama   (United States)

^b OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

Cu(111) films; Epitaxial growth; Magnetron sputtering

Indexed keywords

COPPER; CRYSTAL MICROSTRUCTURE; CRYSTAL ORIENTATION; EPITAXIAL GROWTH; FILM GROWTH; MAGNETRON SPUTTERING; SEMICONDUCTING SILICON; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY; TWINNING; X RAY CRYSTALLOGRAPHY;

POLE FIGURE ANALYSIS;

METALLIC FILMS;

EID: 0032473277     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00954-1     Document Type: Article

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