Gradient metal - a-C:H coatings deposited from dense plasma by a combined PVD/CVD process

Surface and Coatings Technology

Volumn 98, Issue 1-3, 1998, Pages 1518-1523

  Bolt, H ^a   Buuron, A ^a   Hemel, V ^a   Koch, F ^a  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

a C:H coatings; CVD; Plasma; PVD

Indexed keywords

EID: 0006688017     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00394-0     Document Type: Article

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