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Japanese Journal of Applied Physics, Part 2: Letters

Volumn 37, Issue 12 SUPPL. B, 1998, Pages

Generation of novel aluminum nano balls

(6) Goto, Masahiro a,c Murakami, Junichi a Tai, Yutaka a Igarashi, Kazuo a Tanemura, Sakae a Kusunoki, Michiko b

a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST (Japan)

b JAPAN FINE CERAMICS CENTER (Japan)

c JAPAN ATOMIC ENERGY AGENCY (Japan)

Author keywords

Aluminum nano ball; Gas aggregation; Magnetron sputtering; Scanning tunneling microscope; Transmission electron microscope

Indexed keywords

AGGLOMERATION; ALUMINA; COPPER; ELECTRON DIFFRACTION; IMAGE ANALYSIS; MAGNETRON SPUTTERING; NANOSTRUCTURED MATERIALS; SCANNING TUNNELING MICROSCOPY; SPUTTER DEPOSITION; SUBSTRATES; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

GAS AGGREGATION;

ALUMINUM;

EID: 0032290290 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.37.l1537 Document Type: Article

Times cited : (5)

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