Formation of alumina fine particles by a magnetron sputtering gas aggregation method

Zeitschrift fur Physik D-Atoms Molecules and Clusters

Volumn 40, Issue 1, 1997, Pages 115-118

  Goto, M ^a   Murakami, J ^a   Tai, Y ^a   Yoshimura, K ^a   Igarashi, K ^a   Tanemura, S ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0002351268     PISSN: 01787683     EISSN: None     Source Type: Journal    
DOI: 10.1007/s004600050172     Document Type: Article

References (7)

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4. Iijima, S.: J. Electron Microsc. 34, 249 (1985)
5. Haberland, H., Mall, M., Moseler, M., Qiang, Y., Reiners, T., Thurner, Y.: J. Vac. Sci. Tech. A 12, 2925 (1994)
6. Wilson, S., McConnel, J.: Solid State Chem. 34, 315 (1980)
7. Maeno, M.: Technology of Inorganic Material, p. 141, Nikkan Kogyo Newspaper Co., Tokyo 1987