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Volumn 102, Issue 3, 1997, Pages 1582-1587

Harmonic distortion in silicon condenser microphones

Author keywords

[No Author keywords available]

Indexed keywords

SILICONE;

EID: 0030768288     PISSN: 00014966     EISSN: None     Source Type: Journal    
DOI: 10.1121/1.420070     Document Type: Article
Times cited : (10)

References (16)
  • 1
  • 2
    • 0040755792 scopus 로고
    • A subminiature condenser microphone with silicon nitride membrane and silicon back plate
    • D. Hohm and G. Hess, "A subminiature condenser microphone with silicon nitride membrane and silicon back plate," J. Acoust. Soc. Am. 85, 476-480 (1989).
    • (1989) J. Acoust. Soc. Am. , vol.85 , pp. 476-480
    • Hohm, D.1    Hess, G.2
  • 4
    • 0026820718 scopus 로고
    • A silicon condenser microphone with structured back plate and silicon nitride membrane
    • W. Kühnel and G. Hess, "A silicon condenser microphone with structured back plate and silicon nitride membrane," Sens. Actuators A 30, 251-258 (1992).
    • (1992) Sens. Actuators A , vol.30 , pp. 251-258
    • Kühnel, W.1    Hess, G.2
  • 5
    • 0028545959 scopus 로고
    • A silicon condenser microphone using bond-and etch-back technology
    • J. Bergqvist and F. Rudolf, "A silicon condenser microphone using bond-and etch-back technology," Sens. Actuators A 45, 115-124 (1994).
    • (1994) Sens. Actuators A , vol.45 , pp. 115-124
    • Bergqvist, J.1    Rudolf, F.2
  • 6
    • 0028392919 scopus 로고
    • Improvement of the performance of microphones with a silicon nitride diaphragm and backplate
    • P. R. Scheeper, W. Olthuis, and P. Bergveld, "Improvement of the performance of microphones with a silicon nitride diaphragm and backplate," Sens. Actuators A 40, 179-186 (1994).
    • (1994) Sens. Actuators A , vol.40 , pp. 179-186
    • Scheeper, P.R.1    Olthuis, W.2    Bergveld, P.3
  • 7
    • 33744670949 scopus 로고    scopus 로고
    • A silicon condenser microphone with polyimide diaphragm and backplate
    • to be published
    • M. Pedersen, W. Olthius, and P. Bergveld, "A silicon condenser microphone with polyimide diaphragm and backplate," Sens. Actuators A (to be published).
    • Sens. Actuators A
    • Pedersen, M.1    Olthius, W.2    Bergveld, P.3
  • 9
    • 0029157698 scopus 로고
    • Analysis of harmonic distortion in electroacoustic transducers
    • C. H. Sherman and J. L. Butler, "Analysis of harmonic distortion in electroacoustic transducers," J. Acoust. Soc. Am. 98, 1596-1611 (1995).
    • (1995) J. Acoust. Soc. Am. , vol.98 , pp. 1596-1611
    • Sherman, C.H.1    Butler, J.L.2
  • 10
    • 0021386480 scopus 로고
    • Response of an edge-supported circular membrane electret earphone. Part I - Theory
    • I. J. Busch-Vishniac, "Response of an edge-supported circular membrane electret earphone. Part I - Theory," J. Acoust. Soc. Am. 75, 977-989 (1984).
    • (1984) J. Acoust. Soc. Am. , vol.75 , pp. 977-989
    • Busch-Vishniac, I.J.1
  • 13
  • 14
    • 0001283441 scopus 로고    scopus 로고
    • On the mechanical behaviour of thin perforated plates and their application in silicon condenser microphones
    • M. Pedersen, W. Olthuis, and P. Bergveld, "On the mechanical behaviour of thin perforated plates and their application in silicon condenser microphones," Sens. Actuators A 54, 499-504 (1996).
    • (1996) Sens. Actuators A , vol.54 , pp. 499-504
    • Pedersen, M.1    Olthuis, W.2    Bergveld, P.3
  • 16
    • 0030899440 scopus 로고    scopus 로고
    • Electro-acoustical measurements of silicon microphones on wafer scale
    • M. Pedersen, R. Schellin, W. Olthuis, and P. Bergveld, "Electro-acoustical measurements of silicon microphones on wafer scale," J. Acoust. Soc. Am. 101, 2122-2128 (1997).
    • (1997) J. Acoust. Soc. Am. , vol.101 , pp. 2122-2128
    • Pedersen, M.1    Schellin, R.2    Olthuis, W.3    Bergveld, P.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.