Electroacoustical measurements of silicon microphones on wafer scale

Journal of the Acoustical Society of America

Volumn 101, Issue 4, 1997, Pages 2122-2128

  Pedersen, Michael ^a   Schellin, Ralf ^a   Olthuis, Wouter ^a   Bergveld, Piet ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ACCURACY; ACOUSTICS; ARTICLE; FREQUENCY ANALYSIS; MICROPHONE; PIEZOELECTRICITY; PRIORITY JOURNAL; REPRODUCIBILITY; STATISTICAL ANALYSIS;

EID: 0030899440     PISSN: 00014966     EISSN: None     Source Type: Journal    
DOI: 10.1121/1.418143     Document Type: Article

References (22)

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