SCOPUS 정보 검색 플랫폼

Volumn 28, Issue 2, 1991, Pages 93-103

Pressure sensors merge micromachining and microelectronics

Author keywords

[No Author keywords available]

Indexed keywords

BIOMEDICAL ENGINEERING; INTEGRATED CIRCUITS; MICROELECTRONICS; MICROMACHINING; PRESSURE TRANSDUCERS;

PRESSURE MEASUREMENT;

EID: 0026186579 PISSN: 09244247 EISSN: None Source Type: Journal
DOI: 10.1016/0924-4247(91)85018-J Document Type: Article

Times cited : (22)

References (9)

1
- 0024132423
- Surface-micromachining processes for electrostatic microactuator fabrication
- IEEE Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, U.S.A. , pp. 59-62
- Lober¹ Howe²

2
- 84915413989
- Laser micromachining for circuit production
- (1990) Microelectron. Manuf. Test. , pp. 17
- Swenson¹

3
- 0025398379
- Silicon low pressure sensors address HVAC applications
- (1990) Sensors , pp. 30-34
- Bryzek¹ Mallon² Petersen³

4
- 0024101733
- Sensors with digital or frequency output
- (1988) Sensors and Actuators , vol.15 , pp. 119-133
- Middelhoek¹ French² Huijsing³ Lian⁴

5
- 84915383120
- An update on the integration of silicon pressure sensors
- Session Record, 27 Wescon/85, San Francisco, CA, U.S.A.
- Frank¹ McCulley²

6
- 84915353557
- $325 million Motorola facility
- (1990) Solid State Technol. , pp. 23

7
- 84915413774
- Cut and paste technique lowers the cost and design cycle for custom microcontrollers
- EDN , pp. 113
- Mosley¹

8
- 0023430619
- TAB leads as COB format
- (1987) Electron. Packag. Prod. , pp. 46-48
- Markstein¹

9
- 84915383119
- ASIC design decisions demand broader perspective
- Electron. Des. , pp. 145-154
- Buschbrom¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.