Analysis of the Performance of the Capacitive Displacement Transducer

IEEE Transactions on Instrumentation and Measurement

Volumn 38, Issue 4, 1989, Pages 870-875

  Fertner, Antoni ^a   Sjölund, Anders ^a  

^a SWEDISH INSTITUTE OF COMPUTER SCIENCE   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

CONTROL, MECHANICAL VARIABLES--POSITION; MECHANICAL VARIABLES MEASUREMENT--POSITION;

CAPACITIVE DISPLACEMENT TRANSDUCER; MECHANICAL MICRODISPLACEMENT; POSITION SENSING;

TRANSDUCERS;

EID: 0024719881     PISSN: 00189456     EISSN: 15579662     Source Type: Journal    
DOI: 10.1109/19.31006     Document Type: Article

References (5)

1. IBM Tech. Disclosure Bull., vol. 21, no. 1, June 1978.
2. P. B. Kosel, G. S. Munro, and R. Vaughan, “Capacitive transducer for accurate displacement control,” IEEE Trans. Instrum. Meas., vol. IM-30, pp. 114-123, June 1981.
3. K. B. Klaasen and J. C. L. van Peppen, “Linear capacitive micro-displacement transduction using phase readout,” Sensors and Actuators, vol. 3, pp. 209-220, 1982/83.
4. P. D. Chapman, “A capacitance based ultra-precision spindle error analyser,” Precision Eng., vol. 7, no. 3, pp. 129-137, July 1985.
5. V. Mangulis, Handbook of Series for Scientists and Engineers. New York: Academic Press, 1965.