Fast and accurate roughness characterization techniques for wafers and hard disks

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2862, Issue , 1996, Pages 28-33

  Rothe, Hendrik ^a   Kasper, André ^a  

^a HELMUT SCHMIDT UNIVERSITY   (Germany)

Author keywords

ARS TIS sensor head; Atomic force microscopy; Fiber optics; Pattern recognition; Roughness; Scattering

Indexed keywords

ATOMIC FORCE MICROSCOPY; CCD CAMERAS; DATA HANDLING; FIBER OPTICS; FIBERS; FLAT PANEL DISPLAYS; OPTICAL DATA PROCESSING; PATTERN RECOGNITION; SCATTERING; SURFACE ROUGHNESS;

CHARACTERIZATION TECHNIQUES; CHIP MANUFACTURERS; DATA PROCESSING ALGORITHMS; INTERNATIONAL STANDARDS; MEASUREMENT PHILOSOPHY; OPTICAL MEASUREMENT; SENSOR HEAD; VISUAL INSPECTION;

FIBER OPTIC SENSORS;

EID: 85077816681     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.256206     Document Type: Conference Paper

References (7)

1. D. J. Whitehouse, Handbook of Surface Metrology, p. 517, Institute of Physics Publishing, Bristol and Philadelphia 1995.
2. Rothe, H., Kasper, A., "Is there any significant correlation between roughness and scattering near the Rayleighlimit?", Proc. SPIE, No. 2541-20, pp. 161-167, San Diego, 1995.
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4. H. Rothe and H. Truckenbrodt, "Discrimination of surface properties using BHDF-variance estimators as feature variables", Proc SPIE, No. 1781, pp. 152-162, Berlin, 1992.
5. H. Rothe, H. Truckenbrodt, A. Duparré, M. Timm: "Real-time detection of surface damage by direct assessment of the BRDF", Proc. SP1E No. 1995 San Diego, 1993.
6. E. L. Church, "Instrumental effects in surface finish measurement", Proc. SPIE, No. 1009, pp. 46-55, San Diego, 1988.
7. P. A. Lachenbruch, Discriminant Analysis, Hafner Press, New York, 1974.