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Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3167, Issue , 1997, Pages 81-92

Statistical estimators of spatial vector fields in defect classification and texture modeling of high-tech surfaces

(2) Rothe, Hendrik a Hueser, Dorothee a

a HELMUT SCHMIDT UNIVERSITY (Germany)

Author keywords

Circular spherical statistics; Scattering; Surface microtopography; Vector fields

Indexed keywords

CUSTOMER SATISFACTION; DIGITAL IMAGE STORAGE; FLAT PANEL DISPLAYS; GAUSSIAN DISTRIBUTION; IMAGE PROCESSING; IMAGING SYSTEMS; QUALITY ASSURANCE; QUALITY FUNCTION DEPLOYMENT; RANDOM PROCESSES; STATISTICAL TESTS; TEXTURES; TOTAL QUALITY MANAGEMENT; TRELLIS CODES; VECTORS;

CIRCULAR/SPHERICAL STATISTICS; CONFIDENCE INTERVAL (CI); DEFECT CLASSIFICATION; DEFECT DETECTION; FAST ACQUISITION; FLAT PANELS; GAUSSIAN; LINE QUALITY; SCATTERING; SIMULATION RESULTS; STATISTICAL ESTIMATORS; SURFACE MICROTOPOGRAPHY; TECHNICAL SURFACES; TEXTURE MODELING; VECTOR FIELDS;

STATISTICS;

EID: 58749104723 PISSN: 0277786X EISSN: None Source Type: Conference Proceeding
DOI: 10.1117/12.290279 Document Type: Conference Paper

Times cited : (2)

References (8)

1
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2
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- (1994) BRDF sensing with fiber optics, programmable laser diodes and high resolution CCD arrays , Issue.2260 , pp. 83-92
- Rothe, H.¹ Kasper, A.² Riedel, P.³ Specht, O.⁴

3
- 0026969487
- Proc. SPIE, pp, Berlin
- H. Rothe and H. Truckenbrodt, "Discrimination of surface properties using BRDF-variance estimators as feature variables," No. 1781 in Proc. SPIE, pp. 152-162, (Berlin), 1992.
- (1992) Discrimination of surface properties using BRDF-variance estimators as feature variables , Issue.1781 , pp. 152-162
- Rothe, H.¹ Truckenbrodt, H.²

4
- 0010232276
- Proc. SPIE, San Diego
- H. Rothe, H. Truckenbrodt, A. Duparré, and M. Timm, "Real-time detection of surface damage by direct assessment of the BRDF," No. 1995 in Proc. SPIE, (San Diego), 1993.
- (1993) Real-time detection of surface damage by direct assessment of the BRDF , Issue.1995
- Rothe, H.¹ Truckenbrodt, H.² Duparré, A.³ Timm, M.⁴

5
- 58749112030
- H. Rothe and H. Truckenbrodt, Real-time defect detection using multi-aperture fiber optic sensors and machine learning, in International EUROPTO/SPIE Symposium on Electronic Imaging and Device Engineering, V. Gerbig and W. E. Haas, eds., No. 1989 in Proc. SPIE, (Munich), 1993.
- H. Rothe and H. Truckenbrodt, "Real-time defect detection using multi-aperture fiber optic sensors and machine learning," in International EUROPTO/SPIE Symposium on Electronic Imaging and Device Engineering, V. Gerbig and W. E. Haas, eds., No. 1989 in Proc. SPIE, (Munich), 1993.

6
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- Proc. SPIE, pp, Denver
- H. Rothe et. al., "Fast and accurate roughness characterization techniques for wafers and hard disks," No. 2541 in Proc. SPIE, pp. 28-34, (Denver), 1996.
- (1996) Fast and accurate roughness characterization techniques for wafers and hard disks , Issue.2541 , pp. 28-34
- Rothe, H.¹ et., al.²

7
- 85085268264
- Cambridge University Press
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- (1995) Statistical Analysis of Circular Data , pp. 1-14
- Fisher, N.I.¹

8
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- Cambridge University Press
- N. I. Fisher, T. Lewis, and B. J. Engleton, Statistical Analysis of Spherical Data, Cambridge University Press, 1987.
- (1987) Statistical Analysis of Spherical Data
- Fisher, N.I.¹ Lewis, T.² Engleton, B.J.³

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