Comparison of PSD measurements using stray light sensors with PSD curves evaluated from topography of large AFM scans

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3426, Issue , 1998, Pages 262-272

  Hüser, Dorothee ^a   Rinder, Thomas ^a   Rothe, Hendrik ^a  

^a HELMUT SCHMIDT UNIVERSITY   (Germany)

Author keywords

Calibration of stray light sensors; Forward simulation of PSD; Large area AFM scans; Stray light sensors

Indexed keywords

ATOMIC FORCE MICROSCOPY; CALIBRATION; CONTAMINATION; ELECTROMAGNETIC WAVE DIFFRACTION; PATTERN RECOGNITION; SCANNING; STRAY LIGHT;

STRAY LIGHT SENSORS; TOPOGRAPHY;

SENSORS;

EID: 0032224157     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.328475     Document Type: Conference Paper

References (14)

1. Proposed methodology for characterization of microroughness-induced optical scatter instrumentation
2. Fast and accurate roughness characterization techniques for wafers and hard disks
3. Discrimination of surface properties using BRDF-viance estimators as feature variables
4. Application of circular and spherical statistics for the interpretation of BRDF-measurements
5. Evaluation of in-situ ARS sensors for characterizing smooth and rough surfaces
6. Multivariate estimation of the systematic error of scanning probe microscopes