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Volumn 37, Issue 11 PART A, 1998, Pages

Secondary corrosion of aluminum alloy due to residual sidewall and its removal using M=0 helicon plasma reactor

Author keywords

Al etching; BCl3 plasma treatment; H2O CF4 mixture; Helicon plasma; Secondary corrosion; Sidewall polymer

Indexed keywords

ALUMINUM ALLOYS; HELICONS; MIXTURES; PLASMA ETCHING;

PLASMA TREATMENT;

ALUMINUM CORROSION;

EID: 0032209087 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.37.l1336 Document Type: Article

Times cited : (1)

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