Ashing residues on TiN antireflective coating layers

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 6, 1996, Pages 3082-3086

  Miyaji, S ^a   Kato, T ^a   Yamauchi, T ^a  

^a DENSO CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0030495901     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580175     Document Type: Article

References (12)

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