SCOPUS 정보 검색 플랫폼

Journal of Materials Science Letters

Volumn 17, Issue 21, 1998, Pages 1835-1838

Adhesion property of copper nitride film to silicon oxide substrate

(2) Chwa, S O a Kim, K H a

a Pusan National University (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; BONDING; COPPER COMPOUNDS; CRYSTAL ORIENTATION; MAGNETRON SPUTTERING; METALLIZING; OPTICAL MICROSCOPY; PYROLYSIS; SILICA; SPUTTER DEPOSITION; SYNTHESIS (CHEMICAL); X RAY CAMERAS;

COPPER NITRIDE; FUNCTIONALLY GRADED MATERIALS (FGM);

MAGNETIC FILMS;

EID: 0032202638 PISSN: 02618028 EISSN: None Source Type: Journal
DOI: 10.1023/A:1006626124472 Document Type: Article

Times cited : (12)

References (13)

1
- 0030381980
- San Francisco, December, edited by IEEE
- C. PATRICK YUE, C. RYU, J. LAU, T. H. LEE and S. S. WONG, in Proceedings of the International Electron Devices Meeting (San Francisco, December, 1996, edited by IEEE) p. 155.
- (1996) Proceedings of the International Electron Devices Meeting , pp. 155
- Patrick Yue, C.¹ Ryu, C.² Lau, J.³ Lee, T.H.⁴ Wong, S.S.⁵

2
- 0030818985
- E. TARVAINEN, H. RONKAINEN, H. KATTELUS, T. RIIHISAARI and P. KUIVALAINEN, Phys. Scripta T69 (1997) 295.
- (1997) Phys. Scripta , vol.T69 , pp. 295
- Tarvainen, E.¹ Ronkainen, H.² Kattelus, H.³ Riihisaari, T.⁴ Kuivalainen, P.⁵

3
- 0029289104
- W. B. KUHN, A. ELSHABINI-RIAD and F. W. STEPHENSON, Electronics Lett. 31 (1995) 625.
- (1995) Electronics Lett. , vol.31 , pp. 625
- Kuhn, W.B.¹ Elshabini-Riad, A.² Stephenson, F.W.³

4
- 2242481646
- San Francisco, December, edited by IEEE
- J. N. BURGHARTZ, D. C. EDELSTEIN, K. A. JENKINS, C. JAHNES, C. UZOH, E. J. OSULLIVAN, K. K. CHAN, M. SOYUER, P. ROPER and S. CORDES, in Proceedings of the International Electron Devices Meeting (San Francisco, December, 1996, edited by IEEE) p. 96.
- (1996) Proceedings of the International Electron Devices Meeting , pp. 96
- Burghartz, J.N.¹ Edelstein, D.C.² Jenkins, K.A.³ Jahnes, C.⁴ Uzoh, C.⁵ Osullivan, E.J.⁶ Chan, K.K.⁷ Soyuer, M.⁸ Roper, P.⁹ Cordes, S.¹⁰

5
- 0027884466
- S. P. MURARKA, R. J. GUTMANN, A. E. KALOYEROS and W. A. LANFORD, Thin Solid Films 236 (1993) 257.
- (1993) Thin Solid Films , vol.236 , pp. 257
- Murarka, S.P.¹ Gutmann, R.J.² Kaloyeros, A.E.³ Lanford, W.A.⁴

6
- 0030083002
- E. S. CHOI, S. K. PARK and H. H. LEE, J. Electrochem. Soc. 143 (1996) 624.
- (1996) J. Electrochem. Soc. , vol.143 , pp. 624
- Choi, E.S.¹ Park, S.K.² Lee, H.H.³

7
- 0030108763
- C.-K. HU, K. Y. LEE, K. L. LEE, C. CABRAL, JR., E. G. COLGAN and C. STANIS, ibid. 143 (1996) 1001.
- (1996) J. Electrochem. Soc. , vol.143 , pp. 1001
- Hu, C.-K.¹ Lee, K.Y.² Lee, K.L.³ Cabral Jr., C.⁴ Colgan, E.G.⁵ Stanis, C.⁶

8
- 0009480990
- S. TERADA, H. TANAKD and K. KUBOTA, J. Crystal Growth 94 (1989) 567.
- (1989) J. Crystal Growth , vol.94 , pp. 567
- Terada, S.¹ Tanakd, H.² Kubota, K.³

9
- 84884499571
- M. ASANO, K. UMEDA and A. TASAKI, Jpn. J. Appl. Phys. 29 (1990) 1985.
- (1990) Jpn. J. Appl. Phys. , vol.29 , pp. 1985
- Asano, M.¹ Umeda, K.² Tasaki, A.³

10
- 0030213930
- T. MARUYAMA and T. MORISHITA, Appl. Phys. Lett. 69 (1996) 890.
- (1996) Appl. Phys. Lett. , vol.69 , pp. 890
- Maruyama, T.¹ Morishita, T.²

11
- 0000168975
- Idem., J. Appl. Phys. 78 (1995) 4104.
- (1995) J. Appl. Phys. , vol.78 , pp. 4104
- Maruyama, T.¹ Morishita, T.²

12
- 0004077698
- Vol. 06.01
- Annual Book of ASTM Standards, Vol. 06.01.
- Annual Book of ASTM Standards

13
- 2242471702
- Idem., Vol. 15.09
- Idem., Vol. 15.09.

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.