Uncooled infrared focal plane array having 128 x 128 thermopile detector elements

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2269, Issue , 1994, Pages 450-459

  Kanno, Toshio ^a   Saga, Minoru ^a   Matsumoto, Shouhei ^a   Uchida, Makoto ^a   Tsukamoto, Nanao ^a   Tanaka, Akio ^a   Itoh, Shigeyuki ^a   Nakazato, Akihiro ^a   Endoh, Tsutomu ^a   Tohyama, Shigeru ^a   Yamamoto, Yuuichi ^a   Murashima, Susumu ^a   Fujimoto, Nahoya ^a   Teranishi, Nobukazu ^a  

^a JAPAN DEFENSE AGENCY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE COUPLED DEVICES; INFRARED IMAGING; LENSES; MACHINING; MONOLITHIC INTEGRATED CIRCUITS; SEMICONDUCTING SILICON; SENSORS; SILICON DIOXIDE; THERMOPILES;

IR FOCAL PLANE ARRAYS; POLYSILICON;

INFRARED DETECTORS;

EID: 0028755502     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.188660     Document Type: Conference Paper

References (5)