SCOPUS 정보 검색 플랫폼

Volumn 43, Issue 1-3, 1994, Pages 185-187

A thin film bolometer using porous silicon technology

Author keywords

[No Author keywords available]

Indexed keywords

MEMBRANES; POROUS MATERIALS; SEMICONDUCTING SILICON; SENSORS; TEMPERATURE MEASUREMENT; THIN FILMS;

POROUS SILICON TECHNOLOGY;

BOLOMETERS;

EID: 0028426114 PISSN: 09244247 EISSN: None Source Type: Journal
DOI: 10.1016/0924-4247(93)00691-V Document Type: Article

Times cited : (32)

References (10)

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- Lang¹ Kühl² Obermeier³

2
- 0022471349
- A silicon-thermopile-based infrared sensing array for use in automated manufacturing
- ED-33/1
- (1986) IEEE Transactions on Electron Devices , pp. 72-79
- Choi¹ Wise²

3
- 0008564371
- Multijunction thin-film radiation thermopile sensors
- (1988) Measurement , vol.6 , Issue.1 , pp. 1-4
- Meinel¹ Müller² Kessler³ Völklein⁴ Wiegand⁵

4
- 0041641277
- A thin film polysilicon-aluminum thermocouple
- (1991) Sensors Mater. , vol.2 , pp. 247-251
- Kühl¹ Lang²

5
- 84918691651
- H. Baltes and D. Moser, CMOS vacuum sensors and other applications of CMOS thermopiles, 7th Int. Conf. Solid-State Sensors and Actuators (Transducers '93), Yokohama, Japan, June 7–10, 1993, Paper C9-1

6
- 0027568562
- Using porous silicon as a sacrificial layer
- (1993) J. Micromech. Microeng. , vol.3 , Issue.2 , pp. 32-36
- Steiner¹ Richter² Lang³

7
- 84918692078
- W. Lang, P. Steiner, A. Richter, K. Marusczyk, G. Weimann and H. Sandmaier, Application of porous silicon as a sacrificial layer, 7th Int. Conf. Solid-State Sensors and Actuators (Transducers '93), Yokohama, Japan, June 7–10, 1993, Paper A10-5

8
- 33644910106
- Porous silicon formation mechanisms
- (1992) J. Appl. Phys. , vol.71 , pp. R1
- Smith¹ Collins²

9
- 0028406635
- Amorphous silicon carbide and its application in silicon micromachining
- (1994) Sensors and Actuators A , vol.41-42 , pp. 310-316
- Klumpp¹ Schaber² Offereins³ Kühl⁴ Sandmaier⁵

10
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- Heat transport from a chip
- ED-37
- (1990) IEEE Transactions on Electron Devices , pp. 958-963
- Lang¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.