Shape evolution of electrodeposited bumps with deep cavity

Journal of the Electrochemical Society

Volumn 145, Issue 9, 1998, Pages 3007-3010

  Kondo, Kazuo ^a,c   Fukui, Keisuke ^b  

^a OKAYAMA UNIVERSITY   (Japan)

^b UNIVERSITY OF HYOGO   (Japan)

^c ELECTROCHEMICAL SOCIETY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; CATHODES; COMPUTATIONAL FLUID DYNAMICS; ELECTRIC CURRENT DISTRIBUTION; MASS TRANSFER; PHOTORESISTS;

ELECTRODEPOSITED BUMPS; SHAPE EVOLUTION;

ELECTRODEPOSITION;

EID: 0032167312     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1838755     Document Type: Article

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