Computer simulation of ion-assisted thin film deposition

Radiation Effects and Defects in Solids

Volumn 141, Issue 1-4, 1997, Pages 73-81

  Möller, Wolfhard ^a  

^a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DEPOSITION; ION BEAMS; ION BOMBARDMENT; MATHEMATICAL MODELS; MOLECULAR DYNAMICS; MONTE CARLO METHODS; RADIATION EFFECTS; THIN FILMS;

BINARY COLLISION APPROXIMATION; ION ASSISTED THIN FILM DEPOSITION;

FILM GROWTH;

EID: 0030681638     PISSN: 10420150     EISSN: None     Source Type: Journal    
DOI: 10.1080/10420159708211558     Document Type: Article

References (69)

1. J.M.E. Harper, NATO ASI Series E, Vol. 276, p. 251.
2. J.E. Greene, S.A. Barnett, J.-E. Sundgren and A. Rockett, NATO ASI Series E, Vol. 276, p. 281.
3. G.K. Wolf, Surf. Coat. Technol. 43/44 (1990) 920.
4. S. Veprek, Surf. Coat. Technol. 43/44 (1990) 154.
5. J. Hirvonen, Mater. Sci Rep. 6 (1991) 215.
6. H.H. Andersen, Nucl. Instrum. Meth. B 18 (1987) 321.
7. R. Smith and R.P. Webb, Nucl. Instrum. Meth. JB 67 (1992) 373.
8. W. Eckstein, Computer Simulation of Ion-Solid Interactions, Springer-Verlag, Berlin-Heidelberg-New York 1991.
9. W. Möller, NATO ASI Series E, Vol. 155, p. 151.
10. J.P. Biersack and L.G. Haggmark, Nucl. Instrum. Meth. 174 (1980) 257.
11. M.T. Robinson and I.M. Torrens, Phys. Rev. B 9 (1974) 5008.
12. K.-H. Müller, Appl Phys. A 40 (1986) 209.
13. K.-H. Müller, J. Appl. Phys. 59 (1986) 2803.
14. P. Reinke, W. Jacob and W. Möller, J. Appl. Phys. 74 (1993) 1354.
15. W. Möller, Appl. Phys. A 56 (1993) 527.
16. M. Kiuchi, A. Chayahara, Y. Horino, K. Fujii, M. Satou, H.J. Kang, Y.W. Beag, Y. Kimura and R. Shimizu, Jap. J. Appl. Phys. 29 (1990) 2059.
17. V.M. Konoplev, Nucl. Instrum. Meth. B 42 (1989) 229.
18. J. Zhou, Y. Chen, X. Liu and S. Zou, Nucl. Instrum. Meth. B 39 (1989) 182.
19. W. Möller and W. Eckstein, Nucl. Instrum. Meth. B 2 (1984) 814.
20. W. Möller, W. Eckstein and J.P. Biersack, Comp. Phys. Comm. 51 (1988) 355.
21. J.P. Biersack, S. Berg and C. Nender, Nucl. Instrum. Meth. B 59/60 (1191) 21.
22. J.P. Biersack and W. Eckstein, Appl. Phys 34 (1984) 73.
23. W. Möller D. Bouchier, O. Burat and V. Stambouli, Surf. Coat. Technol. 45 (1991) 73.
24. D. Bouchier and W. Möller, Surf. Coat. Technol. 51 (1992) 190.
25. S S Todorov, D. Marton, K.J. Boyd, A.H. Al-Bayati and J.W. Rabalais, J. Vac. Sci. Technol. A 12 (1994) 3192.
26. K.J. Boyd, D. Marton, S.S Todorov, A.H. Al-Bayati, J. Kulik, R.A. Zuhr and J.W. Rabalais, J. Vac. Sci. Technol. A 13 (1995) 2110.
27. A. Anders, S. Anders, I.G Brown and K.M. Yu, Nucl. Instrum. Meth. B 102 (1995) 132.
28. C Nender, S. Berg and J.P. Biersack, Thin Sol. Films 193/194 (1990) 13
29. C. Nender, I.V. Katardjiev, A.M. Barklund, S. Berg and P. Carlsson, Thin Sol. Films 228 (1993) 87.
30. W. Möller, Thin Sol. Films 228 (1993) 319.
31. W. Eckstein and J. Roth, Nucl. Instrum. Meth. B 53 (1991) 279.
32. J B. Gibson, A.N Goland, M. Milgram and G.H. Vineyard, Phys. Rev. 120 (1960) 1229.
33. R.W. Hockney and J.W. Eastwood in Computer Simulation using Particles, McGraw-Hill, New York 1981.
34. D.E. Harrison, Jr and M M. Jakas, Radiat. Eff. 99 (1986) 153.
35. T. Diaz de la Rubia and M.W. Guinan, DOE Fusion Technol. Bulletin (June 1990).
36. M.S. Daw and M.I. Baskes, Phys. Rev. B 29 (1984) 6443.
37. J. Tersoff, Phys. Rev. B 38 (1988) 9902
38. F.H. Stillinger and T.H. Weber, Phys. Rev. B 31 (1985) 5262.
39. D.W. Brenner, Phys. Rev. B 46 (1992) 1948.
40. M. Kitabatake and J.E. Greene, J. Appl. Phys. 73 (1993) 3183.
41. M. Kitabatake and J.E. Greene, Thin Sol. Films 272 (1996) 271.
42. M.V. Ramana Murty and H.A. Atwater, Nucl. Instrum. Meth. B 102 (1995) 293.
43. R. Biswas, J. Appl. Phys. 73 (1993) 3295
44. R. Smith and K. Beardmore, Thin Sol. Films 272 (1996) 255.
45. B.A. Pailthorpe, J. Appl. Phys. 70 (1991) 543.
46. J. Robertson, Diam. Rel. Mater. 2 (1993) 984.
47. B.J. Garrison, P.B.S. Kodali and D. Srivastava, Chem. Rev. 96 (1996) 1327.
48. D.R. Alfonso and S.E Ulloa, Phys. Rev. B 48 (1993) 12235.
49. V. Sundararaman, Honors Thesis, Penn State University, 1995.
50. S. Uhlmann and T Frauenheim, Diam. Rel. Mater. 5 (1995) 169.
51. K.-H. Müller, Phys. Rev. B 35 (1987) 7906.
52. C.C. Fang, F. Jones, R.R. Kola, G.K. Celler and V. Prasad J. Vac. Sci. Technol. B 11 (1993) 2947.
53. C.C. Fang, V. Prasad, F. Jones, J. Vac. Sci. Technol. A 11 (1993) 2778.
54. C.M. Gilmore and J.A. Sprague, Phys. Rev. B 44 (1991) 8950.
55. J.A. Sprague and C.M. Gilmore, Thin Sol. Films 272 (1996) 244.
56. H.-P. Kaukonen and R.M. Nieminen, Phys. Rev. Lett. 68 (1992) 620.
57. G.H Gilmer, C. Roland, D. Stock, M Jaraiz and T. Diaz de la Rubia, Mat. Sci. Engin. B 37 (1996) 1
58. R.S. Averback, T. Diaz de la Rubia, H. Hsieh and R Benedek, Nucl. Instrum. Meth. B 59/60 (1991) 709.
59. J.D. Pelletier, M.H. Shapiro and T.A. Tombrello, Nucl. Instrum Meth. B 67 (1992) 296.
60. H. Haberland, Z. Insepov and M. Moseler, Z. Phys. D 26 (1993) 229.
61. H. Haberland, Z. Insepov, M. Karrais, M. Mall, M. Moseler and Y. Thurner, Nucl. Instrum. Meth. B 80/81 (1993) 1320.
62. H. Haberland, Z. Insepov and M. Moseler, Phys. Rev. B 51 (1995) 11061
63. L. Rongwu, P. Zhengying and H. Yukun, Phys. Rev. B 53 (1996) 4156.
64. I. Yamada and J. Matsuo, Mater. Res. Soc. Symposium Proceedings, Vol. 427 (1996).
65. K. Binder and D.W. Heermann, Monte Carlo Simulation in Statistical Physics, Springer-Verlag, Heidelberg, 1992.
66. D.P. Landau and S. Pal, Thin Sol. Films 272 (1996) 184.
67. B.K. Kellermann, E Chason, J.A. Floro and S.T. Picraux, Mater. Res. Soc. Symposium Proceedings, Vol 388, p. 349.
68. B.K. Kellermann, E. Chason, J.A. Floro, S.T. Picraux and J.M. White, Appl. Phys. Lett. 67 (1995) 1703.
69. E.J. Dawnkaski, D. Srivastava and B.J Garrison, J. Chem. Phys. 104 (1996) 5997.