SCOPUS 정보 검색 플랫폼

"Sensors and Actuators, A: Physical"

Volumn 48, Issue 1, 1995, Pages 47-54

A 32-element micromachined thermal imager with on-chip multiplexing

(4) Baer, Wayne G a Najafi, Khalil a Wise, Kensall D a Toth, Robert S b

a UNIVERSITY OF MICHIGAN (United States)

b Dexter Research Center Inc (United States)

Author keywords

Micromachining; On chip multiplexing; Thermal imagers

Indexed keywords

INFRARED IMAGING; LIGHT ABSORPTION; MICROMACHINING; MULTIPLEXING; REACTIVE ION ETCHING; SILICA; SILICON NITRIDE; SILICON SENSORS; TEMPERATURE MEASUREMENT; THERMOCOUPLES; THERMOPILES; THICKNESS MEASUREMENT;

DIELECTRIC WINDOWS; ENHANCED DEPLETION; NON-CONTACT MEASUREMENTS; ON-CHIP MULTIPLEXING; RAPID THERMAL PROCESSING; THERMAL IMAGERS;

IMAGE SENSORS;

EID: 0029309533 PISSN: 09244247 EISSN: None Source Type: Journal
DOI: 10.1016/0924-4247(95)00980-9 Document Type: Article

Times cited : (29)

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