Trace and ultratrace analysis of gallium arsenide by different mass spectrometric techniques

Journal of Analytical Atomic Spectrometry

Volumn 13, Issue 9, 1998, Pages 983-987

  Becker, Johanna Sabine ^a   Soman, Rajiv S ^b   Becker, Thomas ^c   Panday, Vijay K ^d   Dietze, Hans Joachim ^a  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

^b University of Cincinnati   (United States)

^c RUHR UNIVERSITY BOCHUM   (Germany)

^d Intl Environmental Consulting   (India)

Author keywords

Gallium arsenide; Inductively coupled plasma mass spectrometry; Solid state mass spectrometry; Trace analysis

Indexed keywords

CHLORINATION; DISSOLUTION; GLOW DISCHARGES; HYDROGEN PEROXIDE; ION IMPLANTATION; LASER ABLATION; NITRIC ACID; PLASMA DIAGNOSTICS; SECONDARY ION MASS SPECTROMETRY; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTOR DOPING; TRACE ANALYSIS;

GLOW DISCHARGE MASS SPECTROMETRY (GDMS); INDUCTIVELY COUPLED PLASMA MASS SPECTROMETRY (ICP MS); MATRIX SEPARATION; SPARK SOURCE MASS SPECTROMETRY (SSMS); ULTRATRACE ANALYSIS;

MASS SPECTROMETRY;

EID: 0032163021     PISSN: 02679477     EISSN: None     Source Type: Journal    
DOI: 10.1039/a801525b     Document Type: Article

References (18)

1. Inorganic Mass Spectrometry, ed. Adams, F., Gijbels, R., and van Grieken, R., Wiley, New York, 1988.
2. Becker, J. S., and Dietze, H.-J., Report of Research Centre Juelich, 1998, 3468, 1; Spectrochim. Acta. Part B, 1998, 53, in the press.
3. Becker, J. S., and Dietze, H.-J., Report of Research Centre Juelich, 1998, 3468, 1; Spectrochim. Acta. Part B, 1998, 53, in the press.
4. Mykytiuk, A. P., Semeniuk, P., and Berman, S., Spectrochim. Acta Rev., 1990, 13, 1.
5. Becker, J. S., Saprykin, A. I., and Dietze, H.-J., Int. J. Mass Spectrom. Ion Processes, 1997, 64, 81.
6. Grasserbauer, M., Pure Appl. Chem., 1988, 60, 437.
7. Wiedemann, B., Bethge, K., Schütze, W., Lambert, U., Pahlke, S., Reinhold, T., Weinert, B., and Flade, T., Fresenius' J. Anal. Chem., 1994, 350, 319.
8. Homma, Y., Kurosawa, S., Yoshioka, Y., Shibata, M., Nomura, K., and Nakamura, Y., Anal. Chem., 1985, 57, 2928.
9. van Straaten, M., Swenters, K., Gijbels, R., Verlinden, J., and Adriaenssens, E., J. Anal. At. Spectrom., 1994, 9, 1389.
10. Becker, J. S., and Dietze, H.-J., J. Anal. At. Spectrom., 1995, 10, 637.
11. Becker, J. S., Seifert, G., Saprykin, A. I., and Dietze, H.-J., J. Anal. At. Spectrom., 1996, 11, 643.
12. Becker, J. S., and Dietze, H.-J., Fresenius' J. Anal. Chem., 1997, 359, 338.
13. Dietze, H.-J., Analytikertaschenbuch, 1991, 10, 249.
14. Becker, J. S., Gastel, M., Tender, D., and Dietze, H.-J., in Advances in Mass Spectrometry, Vol. 14. Proceedings of 14th International Mass Spectrometry Conference, 25-29 August 1997, Tampere, Finland, ed. Karjalainen, E. J., Hesso, A. E., Jalonen, J. E., and Karjalainen, U. P., Elsevier, Amsterdam, The Netherlands, 1998.
15. Saprykin, A. I., Becker, J. S., and Dietze, H.-J., J. Anal. At. Spectrom., 1995, 10, 897.
16. Busheina, I. S., Headridge, J. B., Johnson, D., Jackson, K. W., McLeod, C. W., and Roberts, J. A., Anal. Chim. Acta, 1987, 197, 87.
17. Becker, J. S., and Dietze, H.-J., J. Anal. At. Spectrom., 1997, 12, 881.
18. D'Ans Lax, Taschenbuch für Chemiker und Physiker, ed. Blachnik, R., Springer-Verlag, Berlin, Heidelberg and New York, 4th edn., 1998, vol. 3.