Non-contact VLSI imaging using a scanning electric potential microscope

Measurement Science and Technology

Volumn 9, Issue 8, 1998, Pages 1229-1235

  Prance, R J ^a   Clark, T D ^a   Prance, H ^a   Clippingdale, A ^a  

^a UNIVERSITY OF SUSSEX   (United Kingdom)

Author keywords

Electric field; Non contact imaging I testing; Scanning probe microscope; VLS

Indexed keywords

ELECTRIC FIELDS; IMAGING TECHNIQUES; INTEGRATED CIRCUIT TESTING; NONDESTRUCTIVE EXAMINATION; VLSI CIRCUITS; VOLTAGE MEASUREMENT;

SCANNING ELECTRIC POTENTIAL MICROSCOPES (SEPM);

MICROSCOPES;

EID: 0032140360     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/9/8/014     Document Type: Article

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