Determination of flow pattern defect area by μ-photoconductivity decay lifetime measurement

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 37, Issue 8 PART A, 1998, Pages

  Lee, Bo Young ^a   Hwang, Don Ha ^a   Kwon, Oh Jong ^b  

^a LG Siltron Inc   (South Korea)

^b Kyungpook National University   (South Korea)

Author keywords

Anomalous oxygen precipitation; Flow pattern defects; FPD area; Microphotoconductivity decay

Indexed keywords

CRYSTAL DEFECTS; HEAT TREATMENT; OXYGEN; PHOTOCONDUCTIVITY; PRECIPITATION (CHEMICAL);

FLOW PATTERN DEFECTS (FPD); PHOTOCONDUCTIVITY DECAY LIFETIME MEASUREMENT;

SEMICONDUCTOR DEVICE TESTING;

EID: 0032139092     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.l902     Document Type: Article

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