Mesoscopic systems: Bridging from micromachined devices to macroscopic systems

Mechatronics

Volumn 8, Issue 5, 1998, Pages 521-534

  Dewa, Andrew S ^a  

^a MEMStek Products LLC   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

INTERFACES (MATERIALS); MICROMACHINING; X RAY LITHOGRAPHY;

MACROSCOPIC SYSTEMS; MESOSCOPIC SYSTEMS;

MICROELECTROMECHANICAL DEVICES;

EID: 0032136547     PISSN: 09574158     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0957-4158(98)00009-9     Document Type: Article

References (11)

1. Guckel H, Christenson TR, Skrobis KJ, Klein J, Karnowsky M. Design and fabrication of planar magnetic micromotors fabricated by deep X-ray lithography and electroplating. In: Technical Digest, 7th International Conference on Solid-State Sensors and Actuators. (Yokohama, Japan): June 1993, pp. 76-9.
2. Fahrenberg J, Mass D, Menz W, Schomberg WK. Active microvalve system manufactured by the LIGA process. In: Conference Proceedings 4th International Conference on New Actuators, Actuator 94. (Bremen, Germany): June 15-17, 1994, pp. 71-4.
3. Collins SD, Gonzalez C, Smith RL. Microfabrication creates mesoscopic optical systems. Laser Focus World 1997;33(5):187-91.
4. Deng K, Dewa AS, Bonham C, Ritter D, Guckel H, Characterization of gear pumps fabricated by LIGA. Micro System Technology, 1997 (in press).
5. Dewa AS, Deng K, Ritter DC, Bonham C, Guckel H, Massood-Ansari S. Development of LIGA- fabricated, self-priming, in-line gear pumps. In: Digest of Technical Papers, 1997 International Conference on Solid-State Sensors and Actuators. (Chicago, Illinois): 16-19 June, 1997, pp. 757-60.
6. Schomburg WK, Ahrens R, Bacher W, Engemann S, Krehl P, Martin J. Long-term performance analysis of thermo-pneumatic micro pump actuators. In: Digest of Technical Papers, 1997 International Conference on Solid-State Sensors and Actuators. (Chicago, Illinois): 16-19 June, 1997, pp. 365-8.
7. Guckel H, Mangat PS, Emmerich H, Massoud-Ansari S, Klein J, Earles T, Zook JD, Ohnstein T, Johnson ED, Siddons DP, Christenson TR. Advances in photoresist based processing tools for 3-dimensional precision and micro mechanics. Technical Digest, Solid-State Sensors and Actuators Workshop. (Hilton Head, SC): 3-6 June, 1996, pp. 60-3.
8. Garcia EJ, Christenson TR, Polosky MA, Jojola AA. Design and fabrication of a LIGA milliengine. Digest of Tech. Papers, Transducers '97, 1997 Intl. Conf. Solid-State Sensors and Actuators. (Chicago, IL, USA): 16-19 June, 1997, pp. 765-8.
9. RMB Miniature Bearings SA. Data sheet, SYH30001 High Precision Motor 3 mm smoovy™. Biel-Bienne, Switzerland: 1997.
10. Anderson RC, Bogdan GJ, Barniv Z, Dawes TD, Winkler J, Roy K. Microfluidic Biochemical Analysis System. In: Digest of Technical Papers, 1997 International Conference on Solid-State Sensors and Actuators. (Chicago, Illinois): 16-19 June, 1997, pp. 477-780.
11. RMB Miniature Bearings SA. Data sheet, SYH50002 High Precision Motor 5 mm Smoovy™. Biel-Bienne, Switzerland: 1997.