Microfabrication creates mesoscopic optical systems

Laser Focus World

Volumn 33, Issue 5, 1997, Pages 187-222

  Collins, Scott D ^a   González, Carlos ^a   Smith, Rosemary L ^a  

^a Damien Associates   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASSEMBLY; ETCHING; FABRICATION; MICROMACHINING; OPTICAL DEVICES; SILICON WAFERS;

ANISOTROPIC ETCHING; MESOSCOPIC OPTICAL SYSTEMS; MICROFABRICATION; OPTICAL BENCH; OPTICAL PROCESSING; SURFACE MICROMACHINING;

OPTICAL SYSTEMS;

EID: 0031140110     PISSN: 10438092     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Review

References (5)

1. H. C. Nathanson et al., IEEE Trans. Electron. Devices 14(3), 117 (1967).
2. Science and Technology, The Economist 341, 7993 (1997).
3. C. González et al., Proc. SPIE BiOS T97, (1997).
4. C. González and S. D. Collins, Micromachined 1 x n Fiber Optic Switch, to be published in IEEE Photon. Technol. Lett., May 1997.
5. C. R. Friedrich and M. J. Vasile, J. Microelectromechanical Systems 5, 33 (1996).