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Volumn 325, Issue 1-2, 1998, Pages 92-98
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Surface roughness of oxidised copper films studied by atomic force microscopy and spectroscopic light scattering
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Author keywords
Atomic force microscopy; Oxidation; Reflection spectroscopy; Surface roughness
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
COPPER OXIDES;
INTERFACES (MATERIALS);
LIGHT SCATTERING;
PERTURBATION TECHNIQUES;
SURFACE ROUGHNESS;
THERMOOXIDATION;
SPECTROSCOPIC ELASTIC LIGHT SCATTERING;
METALLIC FILMS;
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EID: 0032119690
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/S0040-6090(98)00503-3 Document Type: Article |
Times cited : (6)
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References (27)
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