Incorporation of nitrogen into carbon films produced by PECVD under bias voltage

Diamond and Related Materials

Volumn 7, Issue 6, 1998, Pages 899-902

  Hartmann, J ^a   Schreck, M ^a   Baur, T ^a   Huber, H ^b   Assmann, W ^b   Schuler, H ^a   Stritzker, B ^a   Rauschenbach, B ^a  

^a UNIVERSITY OF AUGSBURG   (Germany)

^b UNIVERSITY OF MUNICH   (Germany)

Author keywords

ERDA depth profiling; Nitrogen doping; PECVD carbon films; Raman spectroscopy; X ray photoelectron spectroscopy

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DOPING (ADDITIVES); ELECTRIC FIELD EFFECTS; FILMS; NITROGEN; RAMAN SPECTROSCOPY; SPECTRUM ANALYSIS;

CARBON FILMS; INCORPORATION;

CARBON;

EID: 0032090660     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(97)00328-2     Document Type: Article

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