Composition evaluation by lattice fringe analysis

Ultramicroscopy

Volumn 72, Issue 3-4, 1998, Pages 121-133

  Rosenauer, A ^a   Fischer, U ^a   Gerthsen, D ^a   Forster A ^b  

^a UNIVERSITY OF KARLSRUHE   (Germany)

^b FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

Chemical analysis; Fringe analysis; InGaAs; Segregation

Indexed keywords

CHEMICAL ANALYSIS; COMPOSITION; ELECTRON MICROSCOPES; ELECTRON MICROSCOPY; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTOR JUNCTIONS;

LATTICE FRINGE ANALYSIS;

TRANSMISSION ELECTRON MICROSCOPY;

ARTICLE; ELECTRON BEAM; IMAGE ANALYSIS; IMAGE RECONSTRUCTION; TRANSMISSION ELECTRON MICROSCOPY;

EID: 0032078917     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0304-3991(98)00002-3     Document Type: Article

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