SCOPUS 정보 검색 플랫폼

Surface Science

Volumn 406, Issue 1-3, 1998, Pages 221-228

Formation of ordered nanocluster arrays by self-assembly on nanopatterned Si(100) surfaces

(6) Winningham, Thomas A a Gillis, H P b Choutov, D A c Martin, Kevin P c Moore, Jon T a Douglas, Kenneth a

a UNIVERSITY OF COLORADO (United States)

b UNIVERSITY OF CALIFORNIA (United States)

c GEORGIA INSTITUTE OF TECHNOLOGY (United States)

Author keywords

Adatoms; Atomic force microscopy; Clusters; Etching; Nucleation; Self assembly; Silicon; Surface diffusion

Indexed keywords

DEPOSITION; DIFFUSION IN SOLIDS; LATTICE CONSTANTS; LITHOGRAPHY; MASKS; NANOSTRUCTURED MATERIALS; NANOTECHNOLOGY; NUCLEATION; OXIDATION; PLASMA ETCHING; SURFACE PHENOMENA; TITANIUM;

NANOPATTERNING; ORDERED NANOCLUSTER ARRAY FORMATION;

SILICON WAFERS;

EID: 0032072974 PISSN: 00396028 EISSN: None Source Type: Journal
DOI: 10.1016/S0039-6028(98)00115-0 Document Type: Article

Times cited : (28)

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