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Volumn 66, Issue 1-3, 1998, Pages 178-183

Vibration sensor using optical-fiber cantilever with bulb-lens

Author keywords

Bulb lens; Cantilevers; Micromachining; Optical fiber sensors; Vibration sensors

Indexed keywords

FAST FOURIER TRANSFORMS; LIGHT EMISSION; MICROMACHINING; VIBRATIONS (MECHANICAL);

EID: 0032050913     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00005-3     Document Type: Article
Times cited : (35)

References (9)
  • 1
    • 0040935202 scopus 로고    scopus 로고
    • Highly reliable silicon micromachined physical sensors in mass production
    • T. Sasayama, et al., Highly reliable silicon micromachined physical sensors in mass production, Sensors and Actuators A 54 (1996) 714-717.
    • (1996) Sensors and Actuators A , vol.54 , pp. 714-717
    • Sasayama, T.1
  • 4
    • 0031099461 scopus 로고    scopus 로고
    • Integrated micro-opto-mechanical vibration sensor connected to optical fibres
    • E. Ollier, P. Labeye, P. Mottier, Integrated micro-opto-mechanical vibration sensor connected to optical fibres, Electron. Lett. 33 (1997) 525-526.
    • (1997) Electron. Lett. , vol.33 , pp. 525-526
    • Ollier, E.1    Labeye, P.2    Mottier, P.3
  • 5
    • 0030102033 scopus 로고    scopus 로고
    • Opto-mechanical accelerometer based on strain sensing by a Bragg grating in a planar waveguide
    • T. Storgaard-Larsen, S. Bouwstra, O. Leistiko, Opto-mechanical accelerometer based on strain sensing by a Bragg grating in a planar waveguide, Sensors and Actuators A 52 (1996) 25-32.
    • (1996) Sensors and Actuators A , vol.52 , pp. 25-32
    • Storgaard-Larsen, T.1    Bouwstra, S.2    Leistiko, O.3
  • 6
    • 0030261844 scopus 로고    scopus 로고
    • Silicon micromechanical optical waveguide for sensing and modulation
    • A.V. Churenkov, Silicon micromechanical optical waveguide for sensing and modulation, Sensors and Actuators A 57 (1996) 21-27.
    • (1996) Sensors and Actuators A , vol.57 , pp. 21-27
    • Churenkov, A.V.1
  • 8
    • 0015636804 scopus 로고
    • Light coupling from a stripe-geometry GaAs diode laser into an optical fiber with spherical end
    • D. Kato, Light coupling from a stripe-geometry GaAs diode laser into an optical fiber with spherical end, J. Appl. Phys. 44 (1973) 2756-2758.
    • (1973) J. Appl. Phys. , vol.44 , pp. 2756-2758
    • Kato, D.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.