Silicon-based metal-semiconductor-metal detectors

MRS Bulletin

Volumn 23, Issue 4, 1998, Pages 55-59

  Buchal, Ch ^a   Loken M ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

OPTICAL INTERCONNECTS; PHOTODIODES; SEMICONDUCTING SILICON; SEMICONDUCTOR METAL BOUNDARIES; VLSI CIRCUITS;

METAL-SEMICONDUCTOR-METAL DETECTORS;

PHOTODETECTORS;

EID: 0032050280     PISSN: 08837694     EISSN: None     Source Type: Journal    
DOI: 10.1557/S088376940003027X     Document Type: Article

References (25)

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