Fabrication and performance characteristics of high-speed ion-implanted Si metal-semiconductor-metal photodetectors

Applied Optics

Volumn 36, Issue 6, 1997, Pages 1180-1184

  Dutta, N K ^a   Nichols, D T ^a   Jacobson, D C ^a   Livescu, G ^a  

^a NOKIA RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 5544290600     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.36.001180     Document Type: Article

References (10)

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