Conversion algorithm for ERDA multielement spectra and its application to thin-film problems

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 140, Issue 1-2, 1998, Pages 243-250

  Spaeth, C ^a   Richter, F ^a   Grigull, S ^b   Kreissig, U ^b  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

^b INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; CARBON; COMPUTER SOFTWARE; CRYSTAL IMPURITIES; CUBIC BORON NITRIDE; ION IMPLANTATION; IONIZATION CHAMBERS; MULTILAYERS; NITROGEN; PHASE INTERFACES; SILICON NITRIDE;

ELASTIC RECOIL DETECTION ANALYSIS (ERDA);

THIN FILMS;

EID: 0032048698     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)01017-3     Document Type: Article

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