Composition analysis of NdxFeyB thin films by RBS and heavy ion ERDA

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 118, Issue 1-4, 1996, Pages 139-143

  Grotzschel R ^a   Mäder, Michael ^a   Kreissig, Ulrich ^a   Grigull, Stephan ^a   Assmann, Walter ^b   Parhofer, Stefan ^c  

^a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

^b UNIVERSITY OF MUNICH   (Germany)

^c SIEMENS AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; COMPOSITION; IONS; MAGNETIC MATERIALS; NEODYMIUM COMPOUNDS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SCATTERING; SPUTTER DEPOSITION; TELESCOPES;

BRAGG IONISATION CHAMBER; ELASTIC COULOMB SCATTERING; ELASTIC RECOIL DETECTION ANALYSIS; GAS TELESCOPE;

THIN FILMS;

EID: 0030565082     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0168-583X(95)01202-8     Document Type: Article

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