Carbon nitride films deposited on 〈111〉 Si substrates by reactive excimer laser ablation

Physica Status Solidi (A) Applied Research

Volumn 166, Issue 2, 1998, Pages 581-586

  D'Anna, E ^a   De Giorgi, M L ^a   Leggieri, G ^a   Luches, A ^a   Martino, M ^a   Perrone, A ^a   Zocco, A ^a  

^a UNIVERSITY OF SALENTO   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ORIENTATION; DEPOSITION; EXCIMER LASERS; LASER ABLATION; NITRIDES; PRESSURE EFFECTS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS; TRANSMISSION ELECTRON MICROSCOPY; X RAY CRYSTALLOGRAPHY; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON NITRIDE;

SEMICONDUCTING FILMS;

EID: 0032046854     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1521-396X(199804)166:2<581::AID-PSSA581>3.0.CO;2-H     Document Type: Article

References (15)

1. A.Y. LIU and M.L. COHEN, Science 245, 841 (1989).
2. C.J. TORNG, J.M. SILVERTSEN, J.H. JUDY, and C. CHANG, J. Mater. Res. 5, 2490 (1990).
3. C. NIU, Y.Z. Lu, and C.M. LIEBER, Science 261, 334 (1993).
4. Z.J. ZHANG, S. FAN, and C.M. LIEBER, Appl. Phys. Lett. 66, 3582 (1995).
5. J. ZEMEK, A. LUCHES, G. LEGGIERI, A. FEJFAR, and M. TRCHOVA, J. Electron Spectroscopy Relat. Phen. 76, 747 (1995).
6. E. D'ANNA, A. LUCHES, A. PERRONE, S. ACQUAVIVA, R. ALEXANDRESCU, I.N. MIHAILESCU, J. ZEMEK, and G. MAJNI, Appl. Surf. Sci. 106, 126 (1996).
7. M.L. DE GIORGI, G. LEGGIERI, A. LUCHES, M. MARTINO, A. ZOCCO, G. BARUCCA, G. MAJNI, E. GYORGY, I.N. MIHAILESCU, and M. POPESCU, Appl. Surf. Sci., accepted for publication.
8. M. DIANI, A. MANSOUR, L. KUBLER, J.L. BISCHOFF, and D. BOLMONT, Diamond Relat. Mater. 3, 264 (1994).
9. F. ROSSI, B. ANDRE, A. VAN VEEN, P.E. MIJNARENDS, H. SHUT, F. LABOHM, M.P. DELPLANCKE, H. DUNLOP, and E. ANGER, Thin Solid Films 253, 85 (1994).
10. D. MARTON, K.J. BOYD, A.H. AL-BAYATI, S.S. TODOROV, and J.W. RABALAIS, Phys. Rev. Lett. 73, 118 (1994).
11. O. MATSUMOTO, T. KOTAKI, H. SHIKANO, K. TAKEMURA, and S. TANAKA, J. Eletrochem. Soc. 141, L16 (1994).
12. S. KUMAR, K.S.A. BUTCHER, and T.L. TANSLEY, J. Vac. Sci. Technol. A 14, 2687 (1996).
13. K. OGATA, J.F.D. CHUBACI, and F. FUJIMOTO, J. Appl. Phys. 76, 3791 (1994).
14. A.P. CARICATO, G. LEGGIERI, A. LUCHES, A. PERRONE, E. GYORGY, I.N. MIHAILESCU, M. POPESCU, G. BARUCCA, P. MENGUCCI, J. ZEMEK, and M. TRCHOVA, Thin Solid Films 307, 54 (1997).
15. S. ACQUAVIVA, A.P. CARICATO, M.L. DE GIORGI, A. LUCHES, and A. PERRONE, Appl. Surf. Sci. 109/110, 408 (1997).