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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 2, 1998, Pages 772-775

Characterization of annealed high-resistivity InP grown by He-plasma-assisted epitaxy

(8) Pinkney, H a Thompson, D A a Robinson, B J a Mascher, P a Simpson, P J b Myler, U b Kang, J U c Frankel, M Y c

a MCMASTER UNIVERSITY (Canada)

b UNIVERSITY OF WESTERN ONTARIO (Canada)

c NAVAL RESEARCH LABORATORY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; BERYLLIUM; CURRENT VOLTAGE CHARACTERISTICS; DEFECTS; ELECTRIC RESISTANCE MEASUREMENT; ELECTRON CYCLOTRON RESONANCE; HELIUM; MOLECULAR BEAM EPITAXY; PLASMAS; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR DOPING; SEMICONDUCTOR GROWTH;

GAS SOURCE MOLECULAR BEAM EPITAXY; POSITRON ANNIHILATION MEASUREMENT; SHEET RESISTANCE MEASUREMENT; TRANSIENT ELLIPSOMETRIC SURFACE PHOTOREFLECTANCE;

SEMICONDUCTING INDIUM PHOSPHIDE;

EID: 0032028707 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.581057 Document Type: Article

Times cited : (6)

References (10)

1
- 0030653632
- Cape Cod, MA
- B. J. Robinson, D. A. Thompson, O. J. Lumley, S. A. McMaster, J. Zhao, H. Pinkney, L. Qian, S. D. Benjamin, and P. W. E. Smith, Proceedings of the Ninth International Conference on Indium Phosphide and Related Materials, Cape Cod, MA (1997), p. 70.
- (1997) Proceedings of the Ninth International Conference on Indium Phosphide and Related Materials , pp. 70
- Robinson, B.J.¹ Thompson, D.A.² Lumley, O.J.³ McMaster, S.A.⁴ Zhao, J.⁵ Pinkney, H.⁶ Qian, L.⁷ Benjamin, S.D.⁸ Smith, P.W.E.⁹

2
- 0000421679
- L. Qian, S. D. Benjamin, P. W. E. Smith, B. J. Robinson, and D. A. Thompson, Appl. Phys. Lett. 71, 1513 (1997).
- (1997) Appl. Phys. Lett. , vol.71 , pp. 1513
- Qian, L.¹ Benjamin, S.D.² Smith, P.W.E.³ Robinson, B.J.⁴ Thompson, D.A.⁵

3
- 85015127361
- D. B. Mitchell, B. J. Robinson, D. A. Thompson, L. Qian, S. D. Benjamin, and P. W. E. Smith, Appl. Phys. Lett. 69, 509 (1996).
- (1996) Appl. Phys. Lett. , vol.69 , pp. 509
- Mitchell, D.B.¹ Robinson, B.J.² Thompson, D.A.³ Qian, L.⁴ Benjamin, S.D.⁵ Smith, P.W.E.⁶

4
- 3142708481
- P. J. Schultz and K. G. Lynn, Rev. Mod. Phys. 60, 701 (1988).
- (1988) Rev. Mod. Phys. , vol.60 , pp. 701
- Schultz, P.J.¹ Lynn, K.G.²

5
- 3343001117
- edited by D. J. Fisher, G. E. Murch, H. Neber-Aeschbacher, and F. M. Wöhlbier Trans. Tech. Publications, Switzerland
- D. W. Lawther and P. J. Simpson, Defect and Diffusion Forum, edited by D. J. Fisher, G. E. Murch, H. Neber-Aeschbacher, and F. M. Wöhlbier (Trans. Tech. Publications, Switzerland, 1996), Vol. 138-139, p. 1-18.
- (1996) Defect and Diffusion Forum , vol.138-139 , pp. 1-18
- Lawther, D.W.¹ Simpson, P.J.²

6
- 0004206649
- Academic
- M. A. Lampert and P. Mark, Current Injection in Solids (Academic, 1970).
- (1970) Current Injection in Solids
- Lampert, M.A.¹ Mark, P.²

7
- 36449007357
- K. Kainosho, H. Shimakura, H. Yamamoto, and O. Oda, Appl. Phys. Lett. 59, 932 (1991).
- (1991) Appl. Phys. Lett. , vol.59 , pp. 932
- Kainosho, K.¹ Shimakura, H.² Yamamoto, H.³ Oda, O.⁴

8
- 0003672023
- Artech House, Boston
- Indium Phosphide and Related Materials: Processing, Technology, and Devices, edited by A. Katz (Artech House, Boston, 1991).
- (1991) Indium Phosphide and Related Materials: Processing, Technology, and Devices
- Katz, A.¹

9
- 0028407655
- M. Y. Frankel and T. F. Carruthers, Appl. Phys. Lett. 64, 1950 (1994).
- (1994) Appl. Phys. Lett. , vol.64 , pp. 1950
- Frankel, M.Y.¹ Carruthers, T.F.²

10
- 0342642555
- J. U. Kang, M. Y. Frankel, J.-W. Huang, and T. F. Kuech, Appl. Phys. Lett. 70, 1560 (1997).
- (1997) Appl. Phys. Lett. , vol.70 , pp. 1560
- Kang, J.U.¹ Frankel, M.Y.² Huang, J.-W.³ Kuech, T.F.⁴

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